Reducing the emission of octafluorocyclobutane (C4F8) which has a high global warming potential (GWP) of 10,300 is essential. This study investigated the effectiveness of C4F8 removal achieved with plasma catalysis system. Effects of Ar content in the gas stream and inlet C4F8 concentration on C4F8 conversion efficiency were evaluated with two types of catalysts including Al2O3 (A) and Al2O3 /ZrO2/SO42-(AZS). Results demonstrated a linear correlation between Ar content with C4F8 conversion, and energy efficiency (EE). Lissajous figure analysis coupled with BOLSIG + simulations revealed that the AZS catalyst applied increased the mean electron energy (MEE) to 2.68 eV and modified the electron energy distribution function (EEDF), likely contributing to its superior performance. At a C4F8 concentration of 400 ppm, the AZS catalyst coupled with plasma achieved 80 % conversion with an EE of 1.85 g/kWh. Interestingly, at an optimal inlet C4F8 concentration of 5,000 ppm, the highest EE (11 g/kWh) was obtained with a C4F8 conversion efficiency of 18 %. The addition of H2O(g) as a reactant resulted in complete C4F8 conversion when AZS catalyst was applied. The optimal plasma-catalytic conditions determined through C4F8 conversion, EE and CO2 equivalent (CO2e) assessments, yielded a CO2e emission (CO2e) to CO2 reduction (CO2r) ratio of 1:9.09. Product analysis revealed the formation of CO2, CO, and HF during C4F8 conversion with AZS catalyst in the presence of H2O(g). The system was operated at 12 kV for the gas stream containing 50 % Ar and N2 as carrier gas at a flow rate of 100 mL/min. These findings highlight the potential of plasma catalysis for the effective abatement of C4F8, offering a promising strategy for mitigating its environmental impact.