The architecture of the Industrial Internet of Things (IIoT) system assumes the presence of a router as the main subsystem, which will allow connecting the subsystems into a single network and connecting them to the equipment of the Internet service provider. Failure of the router can lead to downtime of industrial equipment and the whole workshop at the industrial enterprise, and to the failure of the IIoT system as a whole. Control processing units of industrial routers (RCPU) are complex microprocessor systems (MS). Violation of their operability can be caused by both hardware (HW) and software (SW) failures. Therefore, to increase the reliability of RCPU it is reasonable to use such methods of reliability assurance as HW redundancy (duplication of processors with comparison of results), as well as the use of modern means of control and diagnostics. However, the number of HW and SW failures in RCPUs, is still quite high. In this connection, the solution of issues related to the development of methods for ensuring high reliability of RCPU is of great urgency. This paper proposes a method of ensuring the reliability of RCPU using SW diversity on the basis of priority series. The method let to choose the variant of redundancy of HW and the number of versions of SW as diversity in RCPU.