Compact Electron Cyclotron Resonance Research Articles

Concept design of new compact electron cyclotron resonance ion source with permanent magnets for multi-ion radiotherapy

The multi-ion radiotherapy with dose distribution and Liner Energy Transfer optimization is being studied at QST. Helium, carbon, oxygen and neon ions are considered as ion species for multi-ion therapy. A basic experiment using these ion beams has been carried out at the HIMAC. For heavy-ion radiotherapy facility, it is desirable to operate with only one ECR ion source with permanent magnets from the viewpoint of cost and maintenance. We considered the operating method with only one ion source for multi-ion radiotherapy. Ionization gases were helium, methane, oxygen, and neon to produce He2+, C4+, O6+ and Ne7+ ions. Requirement values of beam current were 940 μA correspond to He2+, 290 μA to C4+, 330 μA to O6+, and 245 μA to Ne7+, respectively. This value was obtained from the number of particles required for the cancer treatment and the transmission efficiency of the accelerator in the HIMAC. We performed some beam tests for design of a new compact ion source with the existing 18 GHz ECR ion source (NIRS-HEC). From the results of the beam tests, we estimate the mirror magnetic field of NIRS-HEC by using POISSON/SUPERFISH code. Then, the structure of the permanent magnets for new ECR ion source is determined so that they reproduce the values of the upstream mirror peak (Binj), B minimum (Bmin) and the downstream mirror peak (Bext) at the NIRS-HEC. The magnetic field of Binj, Bmin and Bext at NIRS-HEC were 1.14 T, 0.475 T and 0.9 T, respectively.

A compact electron cyclotron resonance negative hydrogen ion source for evaluation of plasma electrode materials.

A compact ion source that produces hydrogen plasma with an electron cyclotron resonance (ECR) configuration combined with a 2-stage extraction system with a single aperture of 6 mm diameter has been designed and built to study the performance of different materials as the plasma electrode (PE) of a negative hydrogen ion source. The source has the capability to electrically bias the PE with respect to the ECR plasma. The first experiment with low ECR power input (less than 40 W) was carried out. The PE of the C12A7 electride showed the largest H- current among aluminum, molybdenum, and the C12A7 electride.

Experimental characterization of the AISHa ion source.

The Advanced Ion Source for Hadrontherapy (AISHa) has been designed to generate high brightness multiply charged ion beams for hadron therapy applications. AISHa is a compact electron cyclotron resonance ion source whose hybrid magnetic system consists of a permanent Halbach-type hexapole magnet and a set of independently energized superconducting coils. This has allowed us to achieve high performances in a cost effective way. During the commissioning phase, a few criticalities have been observed and fixed in 2018/19; the improvements will be briefly described and the results of the operations with a single 18 GHz generator will be presented. Particular relevance will be given to the production of high intensity beams of oxygen, argon, and carbon, the latter having huge importance for hadron therapy applications. Perspectives for further improvements, including double frequency heating, will also be highlighted.

New compact ion source design and implementation for low current applications

Abstract A new compact electron cyclotron resonance (ECR) ion source for low current applications, designed and built in-house at the University of the Basque Country (UPV/EHU) is presented. The source was designed to use as many commercially available components as possible for key tasks such as electromagnetic resonators, magnetic structure, RF power couplers and beam transport, to lower the cost and lessen reliance on specially made parts for spares. This leads to a cost-effective yet compact and fully functional design. The main design decisions are described and experiments on plasma generation and the proton beam extracted using the source are shown and discussed.

Characterization of He-Induced Bubble Formation in Tungsten due to Exposure from an Electron Cyclotron Resonance Plasma Source

A compact electron cyclotron resonance plasma source has been utilized at Sandia National Laboratory to expose heated W samples (1270 K) to 50–75 eV He ions at fluxes on the order of 1019 m−2 s−1 and fluences on the order of 1024 m−2. Scanning electron microscopy (SEM) analysis of the surface has indicated bubbles up to 150 nm in diameter that exhibit signs of bursting near the surface. Comparisons have been made between W samples prepared from warm-rolled W sheet stock and ITER-Grade W rod stock. Focused ion beam (FIB) cross sectioning has been used with SEM and transmission electron microscopy (TEM) to identify large sub surface bubbles (100 nm diameter) at depths up to one micron as well as a dense layer of smaller bubbles (<10 nm diameter) within the first 100 nm of the surface, similar to bubble layers observed on higher flux experiments. SEM-Electron Backscatter Diffraction (EBSD) analysis has identified a unique surface morphology feature associated with the exposed ITER-Grade W as well as features similar to previous EBSD studies of rolled W stock. Thermal desorption spectroscopy (TDS) analysis has identified that pre-existing He bubbles found in the Sandia He-ion exposed samples do alter the D trapping and desorbing behavior in W. The findings from these preliminary characterization studies are presented and discussed in context with results from similar plasma exposure stages at other facilities around the world.

Mirror-field confined compact plasma source using permanent magnet for plasma processings

A mirror-field confined compact electron cyclotron resonance (ECR) plasma source using permanent magnets was developed, aiming for the realization of high-quality plasma processings where high-density reactive species are supplied to a substrate with minimizing the ion bombardment damages. The ECR position was located between a microwave transmissive window and a quartz limiter, and plasmas were transported from the ECR position to a midplane of the magnetic mirror field through the quartz limiter. Thus, a radius of core plasma could be determined by the limiter, which was 15 mm in this study. Plasma parameters were investigated by the Langmuir probe measurement. High-density plasma larger than 1011 cm-3 could be produced by applying 5.85-GHz microwave power of 10 W or more. For the outside region of the core plasma where a wafer for plasma processings will be set at, the ion current density was decreased dramatically with distance from the core plasma and became smaller by approximately two orders of magnitude that in the core plasma region for the radial position of 40 mm, suggesting the realization of reduction in ion bombardment damages.

The first measurement of plasma density in an ECRIS-like device by means of a frequency-sweep microwave interferometer.

The note presents the first plasma density measurements collected by a novel microwave interferometer in a compact Electron Cyclotron Resonance Ion Sources (ECRIS). The developed K-band (18.5 ÷ 26.5 GHz) microwave interferometry, based on the Frequency-Modulated Continuous-Wave method, has been able to discriminate the plasma signal from the spurious components due to the reflections at the plasma chamber walls, when working in the extreme unfavorable condition λp ≃ Lp ≃ Lc (λp, Lp, and Lc being the probing signal wavelength, the plasma dimension and the plasma chamber length, respectively). The note describes the experimental procedure when probing a high density plasma (ne > 1 ⋅ 1018 cm-3) produced by an ECRIS prototype operating at 3.75 GHz.

Development and studies on a compact electron cyclotron resonance plasma source

It is well known that electron cyclotron resonance (ECR) produced plasmas are efficient, high-density plasma sources and have many industrial applications. The concept of a portable compact ECR plasma source (CEPS) would thus become important from an application point of view. This paper gives details of such a CEPS that is both portable and easily mountable on a chamber of any size. It uses a fully integrated microwave line operating at 2.45 GHz, up to 800 W, cw. The required magnetic field is produced by a set of suitably designed NdFeB ring magnets; the device has an overall length of ≈60 cm and weighs ≈14 kg including the permanent magnets. The CEPS was attached to a small experimental chamber to judge its efficacy for plasma production. In the pressure range of 0.5–10 mTorr and microwave power of ≈400–500 W the experiments indicate that the CEPS is capable of producing high-density plasma (≈9 × 1011–1012 cm−3) with bulk electron temperature in the range ≈2–3 eV. In addition, a warm electron population with density and temperature in the range ≈7 × 108–109 cm−3 and ≈45–80 eV, respectively has been detected. This warm population plays an important role at high pressures in maintaining the high-density plasma, when plasma flow from the CEPS into the test chamber is strongly affected.

Design of a compact all-permanent magnet ECR ion source injector for ReA at the MSU NSCL

The design of a compact all-permanent magnet electron cyclotron resonance (ECR) ion source injector for the ReAccelerator Facility (ReA) at the Michigan State University (MSU) National Superconducting Cyclotron Laboratory (NSCL) is currently being carried out. The ECR ion source injector will complement the electron beam ion trap (EBIT) charge breeder as an off-line stable ion beam injector for the ReA linac. The objective of the ECR ion source injector is to provide continuous-wave beams of heavy ions from hydrogen to masses up to 136Xe within the ReA charge-to-mass ratio (Q/A) operational range from 0.2 to 0.5. The ECR ion source will be mounted on a high-voltage platform that can be adjusted to obtain the required 12keV/u injection energy into a room temperature radio-frequency quadrupole (RFQ) for further acceleration. The beam line consists of a 30kV tetrode extraction system, mass analyzing section, and optical matching section for injection into the existing ReA low energy beam transport (LEBT) line. The design of the ECR ion source and the associated beam line are discussed.

Characterization of a compact ECR plasma source and its applications to studies of helium ion damage to tungsten

Exposure of tungsten to low energy (<100 eV) helium plasmas at temperatures between 900–1900 K in both laboratory experiments and tokamaks has been shown to cause severe nanoscale modification of the near surface resulting in the growth of tungsten tendrils. Tendril formation can lead to non-sputtered erosion and dust formation. Here we report on characterization of a compact electron cyclotron resonance (ECR) He plasma source with an ion flux of ∼2.5 × 1019 ions m−2 s−1, average fluence of 3 × 1024 ions m−2, and the surface morphology changes seen on the exposed tungsten surfaces. Exposures of polished tungsten disks at temperatures up to 1270 K have been performed and characterized using scanning electron microscopy and atomic force microscopy (AFM) scans. Bubbles and craters have been seen on the exposed tungsten surface growing to up to 150 nm in diameter. The ECR source has been tested for eventual use on a scanning tunneling microscopy experiment intended to study the early stages of surface morphology change due to He ion exposure.

Development of a compact ECR ion source for various ion production.

There is a desire that a carbon-ion radiotherapy facility will produce various ion species for fundamental research. Although the present Kei2-type ion sources are dedicated for the carbon-ion production, a future ion source is expected that could provide: (1) carbon-ion production for medical use, (2) various ions with a charge-to-mass ratio of 1/3 for the existing Linac injector, and (3) low cost for modification. A prototype compact electron cyclotron resonance (ECR) ion source, named Kei3, based on the Kei series has been developed to correspond to the Kei2 type and to produce these various ions at the National Institute of Radiological Sciences (NIRS). The Kei3 has an outer diameter of 280 mm and a length of 1120 mm. The magnetic field is formed by the same permanent magnet as Kei2. The movable extraction electrode has been installed in order to optimize the beam extraction with various current densities. The gas-injection side of the vacuum chamber has enough space for an oven system. We measured dependence of microwave frequency, extraction voltage, and puller position. Charge state distributions of helium, carbon, nitrogen, oxygen, and neon were also measured.

Status of a compact electron cyclotron resonance ion source for National Institute of Radiological Sciences-930 cyclotron

The Kei-source is a compact electron cyclotron resonance ion source using only permanent magnets and a frequency of 10 GHz. It was developed at the National Institute of Radiological Sciences (NIRS) for producing C(4+) ions oriented for high-energy carbon therapy. It has also been used as an ion source for the NIRS-930 cyclotron. Its microwave band region for the traveling-wave-tube amplifier and maximum output power are 8-10 GHz and 350 W, respectively. Since 2006, it has provided various ion beams such as proton, deuteron, carbon, oxygen, and neon with sufficient intensity (200 μA for proton and deuteron, 50 μA for C(4+), for example) and good stability for radioisotope production, tests of radiation damage, and basic research experiments. Its horizontal and vertical emittances were measured using a screen monitor and waist-scan. The present paper reports the current status of the Kei-source.

Design of a compact electron cyclotron resonance ion source for medium charge state light ions

At the Australian Nuclear Science and Technology Organization we are developing a new isotope ratio mass spectrometer based on the measurement of multiple charge state ions. We have carried out a review of our existing ECR ion source and identified a number of design flaws. For the new instrument, we are producing a new ECR source and have refined the design, in particular by using 3D simulations to improve the magnetic confinement field and by a combination of simulations and experiments to improve the design of the microwave coupling.

A compact electron cyclotron resonance proton source for the Paul Scherrer Institute's proton accelerator facility

A compact electron cyclotron resonance proton source has been developed and installed recently at the Paul Scherrer Institute's high intensity proton accelerator. Operation at the ion source test stand and the accelerator demonstrates a high reliability and stability of the new source. When operated at a 10-12 mA net proton current the lifetime of the source exceeds 2000 h. The essential development steps towards the observed performance are described.

The compact electron cyclotron resonance ion source KeiGM for the carbon ion therapy facility at Gunma University

A high-energy carbon-ion radiotherapy facility is under construction at Gunma University Heavy Ion Medical Centre (GHMC). Its design was based on a study of the heavy ion radiotherapy at the National Institute of Radiological Sciences (NIRS) in order to reduce the size and construction cost of the facility. A compact electron cyclotron resonance ion source (ECRIS) for Gunma University, called KeiGM, was installed in 2008. It is almost a copy of the prototype ECRIS Kei2 which was developed by NIRS; meanwhile this prototype produced over 1 e mA of C(4+) using C(2)H(2) gas (660 W and 40 kV). The beam intensity of C(4+) was 600 e microA with CH(4) gas (250 W and 30 kV). The beam intensity satisfies the required value of 300 e microA.

Application of compact electron cyclotron resonance ion source

The compact electron cyclotron resonance (ECR) ion source with a permanent magnet configuration (Kei2 source) has been developed at National Institute of Radiological Sciences for a new carbon therapy facility. The Kei2 source was designed for production of C(4+) ions; its performance such as beam intensity and stability has already reached the medical requirements. Therefore, the prototype development of the source for medical use is essentially finished. Recently, we have started a few studies on other applications of the source. One is the production of fullerenes in the ECR plasma and modified fullerenes with various atoms for new materials. A second application is the production of multiply charged ions (not only carbon) for ion implantation. In this paper, some basic experiments for these applications are reported.

First plasma of the A-PHOENIX electron cyclotron resonance ion source

A-PHOENIX is a new compact hybrid electron cyclotron resonance ion source using a large permanent magnet hexapole (1.92 T at the magnet surface) and high temperature superconducting Solenoids (3 T) to make min- B structure suitable for 28 GHz cw operation. The final assembly of the source was achieved at the end of June 2007. The first plasma of A-PHOENIX at 18 GHz was done on the 16th of August, 2007. The technological specificities of A-PHOENIX are presented. The large hexapole built is presented and experimental magnetic measurements show that it is nominal with respect to simulation. A fake plasma chamber prototype including thin iron inserts showed that the predicted radial magnetic confinement can be fulfilled up to 2.15 T at the plasma chamber wall. Scheduled planning of experiments until the end of 2008 is presented.

Improvement of the Kei2 source for a new carbon therapy facility

A compact electron cyclotron resonance ion source with all permanent magnets has been developed for a new carbon therapy facility at NIRS. Initial tests with the Kei2 source have given a maximum intensity of 530eμA for C4+ at an extraction voltage of 40 kV and beam stability of better than 6% for 90 h at 280eμA at 30 kV. In these beam tests, there was continuously unwanted discharge around the puller at high-voltage extraction (above 40 kV). The start of discharge is caused by the short distance of 5 mm between the end of the plasma chamber and puller. At high-voltage extraction, this discharge will give rise to unwanted vapor from the copper puller. Then, the vacuum pressure in the extraction region will become worse. In order to suppress the discharge, the plasma chamber and puller were modified. Finally, a beam intensity of 380eμA was obtained with good stability at an extraction voltage of 30 kV. This article describes the modification of the puller for stable beam extraction, measurements of beam emittance, and improvement of C4+ intensity.

Electron cyclotron resonance ion source DECRIS-4 for the U400 cyclotron

The electron cyclotron resonance ion source DECRIS-4 has been designed and constructed at the FLNR to be used as a second injector of heavy multiply charged ions for the U-400 cyclotron. After the modification of the injection side this source can be also used as a “charge breeder” (the “1+→n+” method) for the second phase of the Dubna radioactive ion beams project. The main feature of the ion source design is the creation of the extended resonance zone in a comparatively compact electron cyclotron resonance ion source. For this purpose the axial magnetic field is formed with a flat minimum. In this case the superposition of the axial magnetic field and the radial field of the permanent-magnet hexapole, made from NdFeB, allows one to create a larger resonance volume. For the plasma heating a microwave frequency of 14 GHz is used. In this paper we will present the basic design features of the ion source, including the results of the magnetic-field measurements. Some preliminary results of ion source tests are also reported.

EUV emission from xenon in the 10–80 nm wavelength range using a compact ECR ion source

In this work we have studied the generation of EUV light by a novel compact electron cyclotron resonance ion source (CECRIS). The EUV emission diagnostics of the ECR plasma was accomplished by means of a 1.5m grazing incidence monochromator which was operated in a wavelength range of 4–90nm under the condition of medium to high resolution to discriminate between spectra arising from different Xeq+ (q=2–10) charge states. One of the major accomplishments of this study is assignment of numerous new optical transitions for xenon in the 10–80nm range to create a database for further investigations. High resolution spectra were recorded in the 10–16nm range confirming significant contributions from highly excited Xe10+ and Xe9+ ionic states. Major outcome of this work is that the Xe10+ ion emission with λ=13.4nm may occurs with such a simplified and compact ECR source. The EUV emission of this particular line is of great interest for lithography applications.