The paper reports on the effects of plasma radial inhomogeneity on the power absorption in a helicon plasma source, which are computationally investigated by the CST Microwave Studio code. RF (13.56 MHz) power deposition was studied using three designs of antennas, namely, the Nagoya type-III, the fractional helix, and the single loop. Argon was used as the plasma working gas at the operating pressure of 15 mTorr. We have focused on the collisional power absorption utilizing WKB approximation to describe the plasma inhomogeneity. The obtained results show that the radial inhomogeneity has different effects on the power absorption at the low and the high magnetic fields. It is found that at low magnetic fields (i.e., B0=0.01 T), there is a specific density (nc) ranging from 5×1018 m−3 to 1×1019 m−3, before and after which the radial inhomogeneity decreases and increases the absorbed power, respectively. On the other hand, at high magnetic fields (i.e., B0=0.1 T), the inhomogeneity has no regular effect on the power absorption in various plasma densities. In addition, for a given plasma density (e.g., n=1018 m−3), as the magnetic field increases, the radial inhomogeneity effect on the power absorption would decrease for the Nagoya type-III and the fractional helix designs. However, for the single loop antenna design, this effect is negligible.
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