Single‐atom (SA) or single‐site catalysis (SACs) has over the past years become an increasingly fascinating topic in the catalysis field. SACs have allowed new approaches in heterogeneous catalysis, minimized the use of precious metals, and enabled an unprecedented control over atomistic effects, resulting in improved active sites, and at the same time enabled the design of metal–support interfaces with a high level of structural and chemical control [1,2]. A diverse range of supports and features is known to stabilize isolated metal atoms, notably through pinning at electronic and/or structural defects associated with coordinatively unsaturated sites. However, it is still difficult to create a high density of thermally stable support sites, and hence the fabrication and control of high SA loading remains a challenge [1,2].In this work, an atomic‐scale defect engineering approach to form and control traps for SA sites as co‐catalyst for photocatalytic H2 generation is described. The control over defect types and density can be monitored by electron paramagnetic resonance spectroscopy (EPR) as the most precise method to study atomic scale defects [3]. Thin sputtered TiO2 layers are used as a model photocatalyst, and compared to the more frequently used (001) anatase sheets. To form stable SA co-catalysts, the TiO2 layers are reduced in Ar/H2 under different conditions (leading to different but defined Ti3+‐Ov surface defects), followed by immersion in a dilute solution containing Pt ion in this study. HAADF‐STEM results show that only on the thin‐film substrate can the density of SA sites be successfully controlled by the degree of reduction by annealing. An optimized SA‐Pt decoration can enhance the normalized photocatalytic activity of a TiO2 sputtered sample by a great extent in comparison to a conventional nanoparticle‐decorated TiO2 surface. Most interestingly, in the follow up work based on DFT calculations and experimental data we show that Pd single atom outperforms Pt as the most active co-catalyst for photocatalytic H2 evolution [4]. HAADF‐STEM, XPS, and EPR investigation jointly confirm the atomic nature of the decorated Pt and Pd on TiO2. Importantly, the density of the relevant surface exposed defect centers—thus the density of SA sites, which play the key role in photocatalytic activity—can be precisely optimized.[1] Sh. Mohajernia et al. Adv. Mater. 2020, 32 (16).[2] A. Wang, J. Li, and T. Zhang, Nat. Rev. Chem., 2(6).[3] Sh. Mohajernia et al. J. Mater. Chem. A, 2020, 8(1432)[4] G. Cha et al. iScience, 2021, 8 (24). Figure 1