Two novel low- ε r REVO 4 (RE = Yb, Ho) microwave dielectric ceramics with the symmetry of the zircon structure, space group I 4 1 / amd , were prepared using the solid-state method. Dense REVO 4 (RE = Yb, Ho) ceramics sintered at 1200 °C and 1160 °C performed ε r ∼ 12.3 ± 0.1 and 13.3 ± 0.1, Q × f ∼ 28,200 ± 300 GHz and 24,100 ± 300 GHz, τ f ∼ −18.8 ± 0.5 ppm/°C and −17.4 ± 0.5 ppm/°C, along with thermal expansion coefficient ( α L ) of 9.0 ppm/°C and 8.1 ppm/°C, respectively. Bond valence results indicated that the slightly rattling RE 3+ cations at the A-site and compressed V 5+ at the B-site occurred in both ceramics. The positive deviations ( Δε r ) of porosity corrected ε r (Corr) from those calculated by the Clausius-Mosotti equation ε r (C-M) , 8.1% for YbVO 4 and 17.7% for HoVO 4 , were observed, implying that the rattling effect of RE 3+ in dodecahedral A-site were greater than those of compressed V 5+ in tetrahedral B-site. Rattling effect also led REVO 4 (RE = Yb, Ho) to develop higher ε r , and smaller τ ε and τ αm , then closer to zero τ f values than other zircon-structured REVO 4 (RE = Ce, Nd, Sm, Eu) ceramics with large negative τ f . The differences in sintering temperature and microwave dielectric performance of both ceramics were discussed using the packing fraction, full width at half maximum (FWHM) of Raman modes and Phillips-Van Vechten-Levine (P–V-L) theory.
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