The detection and classification of volatile organic compounds (VOCs) are of great significance in atmospheric environment monitoring and have garnered extensive attention in recent decades. This study proposes a virtual sensor array (VSA) for VOC detection and classification fabricating a single-chip high-Q-factor film bulk acoustic resonator (FBAR) functionalized with MIL-101(Cr) thin film, known for its porous crystal structure and high specific surface area. The sensing performance of five different VOCs was evaluated to characterize the VOCs, achieving high detection accuracy calibrated with the Langmuir adsorption model. The FBAR’s frequency response was utilized to determine the sensitivity and limit of detection (LOD), yielding sensitivity and LOD of 85.45 Hz/ppm and 51 ppm, respectively, for isopropanol. The identification and classification capabilities of the proposed VSA for VOCs and their mixtures were assessed using statistical methods and machine learning algorithms, realizing classification accuracies of 100 % for pure VOCs and 94.6 % for mixtures. The developed VSA demonstrates superior performances in VOC detection and classification, with potential applications across various domains.
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