Poly(para-xylylene) thin films from Gorham method via chemical vapor polymerization (CVP) process (so called Parylene) have been extensively utilized in various application fields. Specific functional groups can be also introduced into thin polymeric films via CVP process using functionalized paracyclophane dimer. There have been numerous efforts to fabricate parylene thin films using synthesized and functionalized paracyclophane dimers so far. Herein we report on synthesis of fluorine containing paracyclophane dimers and their polymeric thin films via Gorham method. Three different types of fluorine containing paracyclophane derivatives are synthesized and the CVP thin films are prepared in all cases by adjusting processing condition. Even though the functional groups on parylene thin films are similar, dramatic differences in surface energy can be observed. This work can provide extended material choices for whom want to precisely control surface properties with robust, pin-hole free, and conformal coatable polymeric thin films.
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