A set of experimental and measurement techniques to study the influence of a plasma jet on the main material parameters of piezoelectric ceramics has been presented. A series of plasma experiments has been carried out using a pulsed plasma jet system. It allows of a metered-dose exposure to plasma of different composition and fluence with a constant particle flux density of 1021/m2, energy flux density of 0.1 MJ/m2 and average particle energy of 100–200 eV in a pulse duration of 15 μs. The study of the effects that a repeated exposure to an extreme heat flux of helium and hydrogen plasmas has on the near-surface layer structure and basic material parameters of mass-produced piezoelectric ceramic samples has been presented. The main result of the research is an experimental confirmation of the surface micro-structuring starting after just a few cycles of plasma exposure while only a slight decrease of the main material parameters as well as the preservation of polarization has been observed for two types of different compositions of PZT-ceramics. A further increase in the number of exposure pulses leads to practically no change of main material parameters of both ceramics, even showing a tendency for recovery instead.
Read full abstract