Cathodic Vacuum Arc Research Articles

Regulatory mechanism of N2 flow rate on structure and properties of CrAlNiYN coatings by FCVA technique

In this work, a novel CrAlNiYN coating was prepared by filter cathode vacuum arc (FCVA) technique. The evolution of the microstructure and properties of the coatings with varying N2 flow rates was systematically investigated. The results revealed that as the N2 flow rate increased from 10 to 90 sccm, the N content in the coating increased from 2.54 to 46.20 at.%, while the Ni content significantly decreased from 67.54 to 31.15 at.%. Simultaneously, the phase structure transitioned from the intermetallic compound AlNi3 to the solid solution Al(Cr)N. This transformation, along with solid solution strengthening and grain refinement, resulted an increase in hardness from 13.4 ± 0.4 to 26.6 ± 0.6 GPa. Moreover, the H/E, H3/E2 and We values also displayed a gradually increasing trend, indicating improved resistance to plastic deformation. However, the adhesion strength presented a weakening trend from HF1 to HF3. Furthermore, the corrosion current density of coatings first increased and then slightly decreased with the increase of N2 flow rate, while the polarization resistance had the opposite trend of change. Among them, the coating at 10 sccm exhibited the best corrosion resistance, with the lowest icorr of 0.150 μA cm−2 and the highest Rp of 302.1 kΩ cm2.

Multi-Component Lithiophilic Alloy Film Modified Cu Current Collector for Long-Life Lithium Metal Batteries by a Novel FCVA Co-Deposition System.

Surface modification of Cu current collectors (CCs) is proven to be an effective method for protecting lithium metal anodes. However, few studies have focused on the quality and efficiency of modification layers. Herein, a novel home-made filtered cathode vacuum arc (FCVA) co-deposition system with high modification efficiency, good repeatability and environmental friendliness is proposed to realize the wide range regulation of film composition, structure and performance. Through this system, ZnMgTiAl quaternary alloy films, which have good affinity with Li are successfully constructed on Cu CCs, and the fully enhanced electrochemical performances are achieved. Symmetrical cells constructed with modified CCs maintained a fairly low voltage hysteresis of only 13mV after 2100h at a current density of 1mA cm-2. In addition, the capacity retention rate is as high as 75.0% after 100 cycles in the full cells. The influence of alloy films on the dynamic evolution process of constructing stable artificial solid electrolyte interphase (SEI) layer is revealed by in situ infrared (IR) spectroscopy. This work provides a promising route for designing various feasible modification films for LMBs, and it displays better industrial application prospects than the traditional chemical methods owing to the remarkable controllability and scale-up capacity.

Development of smart molecularly imprinted tetrahedral amorphous carbon thin films for in vitro dopamine sensing

This study investigates how varying the thickness of tetrahedral amorphous carbon (ta-C) thin films and incorporating a titanium adhesion layer influences the structural and electrochemical properties of molecularly imprinted ta-C thin film-based sensing platforms, aiming to develop a molecularly imprinted ta-C electrochemical sensor for dopamine (DA) detection with physiologically relevant sensitivity. This electrochemical sensing platform was designed by integrating ta-C with molecularly imprinted polymers (MIPs). The process involved depositing a ta-C thin film onto boron-doped p-type silicon wafers through a filtered cathodic vacuum arc (FCVA) system. Subsequently, the ta-C sensing platforms were electrochemically coated with the MIP layer (DA-imprinted polypyrrole). We evaluated three configurations: (i) a 15 nm ta-C layer, (ii) a 7 nm ta-C layer with a 20 nm titanium adhesion layer, and (iii) a 15 nm ta-C layer with a 20 nm titanium adhesion layer. Comprehensive structural and electrochemical characterization was performed to understand how these modifications affect sensor performance. The optimized MIP/ta-C sensor demonstrated a sensitivity of 0.16 μA μM−1 cm−2 and a limit of detection (LOD) of 48.6 nM, suitable for detecting DA at physiological levels. Leveraging the synergistic effects of ta-C coatings and molecular imprinting, as well as its compatibility with common complementary metal–oxide–semiconductor (CMOS) processes underlines its potential for integration into microanalytical systems, paving the way for miniaturized and high-throughput sensing platforms.

Comparison of Corrosion Behavior of a-C Coatings Deposited by Cathode Vacuum Arc and Filter Cathode Vacuum Arc Techniques

This study explores the utilization of cathodic vacuum arc (CVA) technology to address the limitations of magnetron sputtering technology in preparing amorphous carbon (a-C) coatings, such as having a low ionization rate, low deposition rate, and insufficiently dense structure. Specifically, a-C coatings were prepared by the cathodic vacuum arc (CVA)and the filtered cathodic vacuum arc (FCVA) technology,, one with embedded carbon particles and one without, both having closely related carbon structures. Research is currently underway on bipolar plate coatings for fuel cells. The corrosion behavior of the prepared a-C coatings was examined through Tafel polarization analysis under simulated fuel cell operating conditions as well as potentiostatic analysis at 0.6 V under normal conditions and 1.6 V under start–stop conditions for 7200 s. The coatings before and after corrosion are characterized using scanning electron microscopy, energy-dispersive X-ray spectroscopy, Raman spectroscopy, and infrared spectroscopy. The results reveal that the incorporation of conductive graphite-like particles in the coatings reduces their contact resistance. However, the gaps between these particles and the coatings act as pathways for corrosive solution, exacerbating the corrosion of the coatings. After corrosion at 0.6 V, both sets of coatings with sp2-hybridized carbon structures are contaminated by elements such as hydrogen and oxygen, leading to an increase in their contact resistance. Under high potential conditions (1.6 V), large corrosion pits and defects appear at the locations of graphite-like carbon particles. Furthermore, both sets of samples exhibit more severe oxygen contamination and a transformation of broken carbon bonds from sp3- to sp2-hybridized forms, irrespective of whether embedded graphite particles are present.

Study on preparation and anti-sand erosion performance of thick DLC coating combined with FCVA deposition and HVP technology

To address the compatibility issues between the hardness and thickness of DLC coatings and to improve the erosion resistance of engine blades, a thick DLC coating was prepared using a combination of filter cathode vacuum arc (FCVA) deposition technology and high voltage pulse (HVP) technology. The prepared thick DLC coating exhibits low residual stress (1.79 ± 0.087 GPa) and high C-sp3 content (70.13 %), with a thickness and hardness of 18.46 μm and 51.07 ± 0.23 GPa, respectively. The results of anti-sand erosion tests indicate that the mass loss rates of DLC coating at the erosion angles of 45° and 90° are 4.44 × 10−3 mg/g and 1.99 × 10−2 mg/g, respectively. The good erosion resistance of thick DLC coatings is attributed to the consumption of residual impact energy by carbon cluster structures, which prevents the generation and propagation of cracks. Therefore, the thick and super-hard DLC coatings can be prepared by combining FCVA deposition technique with HVP technique, which has great potential applications in the aerospace industry.

A comparative study on the structure and properties of TiAlSiN coatings deposited by FCVA and HiPIMS

The TiAlSiN coating has garnered significant interest due to its exceptional hardness, high oxidation resistance temperature, robust film-substrate bond strength, excellent wear resistance, and superior thermal stability. The energetic ion beam technology has emerged as a potent method for fabricating thin films. In this study, TiAlSiN films were deposited utilizing magnetic filtered cathode vacuum arc (FCVA) and high power pulsed magnetron sputtering (HiPIMS), and their respective structures and properties were meticulously investigated and contrasted. Upon comparative analysis, it was observed that the elemental composition of the FCVA films underwent a pronounced change with the same. Depending on the desired film thickness, the deposition rate of the FCVA system was found to be superior over the same duration. The crystallographic structure of the films fabricated by both systems predominantly featured an fcc-(Ti,Al)N phase. Notably, at an N2 flow rate of 40 sccm, the film deposited via HiPIMS demonstrated remarkable hardness (27.04 GPa), an elevated H/E* ratio (0.103), and superior wear resistance (7.24×10−6 mm3/N∙m). The films produced by these two deposition methods exhibited discernible differences and clear trends in hardness, adhesion strength, and tribological properties. This research provides a valuable reference for selecting the most appropriate deposition process and parameters based on the desired attributes of the coatings.

Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Changes in the incident behavior of carbon ions

Diamond-like carbon (DLC) films have attracted great interest from the industry because they have beneficial mechanical properties such as low friction, high hardness, and wear resistance. DLC films have been used for the surface modification of various mechanical components, although many components that require surface treatments have complex three-dimensional (3D) surface structures. To date, 3D deposition of DLC films remains difficult using conventional methods. Particularly, uniform deposition technology on 3D components has not been developed for tetrahedral amorphous carbon (ta-C) films, which possess high CC sp3 bonds with high hardness. In this study, the filtered cathodic vacuum arc (FCVA) method was used to synthesize ta-C films on Si substrates placed on the sidewalls of trench-shaped and one-side tilted samples at various tilt angles and investigated their microstructure and hardness by Raman spectroscopy and nanoindentation. The results showed that the G peak position, full width at half maximum of G peak (FWHM (G)), and hardness of the ta-C film on the trench sidewall decreased as the depth from the top surface increased, similar to previous research. In contrast, ta-C films deposited on one-side tilted sample showed little depth dependence, and the film properties were determined by the tilt angle. We revealed that the film property dependence on the trench depth direction is due to the sputtered particles from the opposing trench sidewalls, resulting in graphitization of the film.

Enhanced tribological behavior and corrosion resistance in AlSiC-based coatings through varied carbon content

A series of AlSiC-based nanocomposite coatings with varying carbon concentrations were fabricated by filtered cathodic vacuum arc (FCVA) technology. These coatings featured an amorphous matrix with embedded Al4Si3C6 nanocrystals. With the increase in carbon content, the proportion of amorphous structure within the structure grew, which was accompanied by a rise in sp3 hybridized carbon bonds. This compositional change led to a significant enhancement in hardness and toughness. Notably, the AlSiC coating deposited at a flow rate of 50 sccm displayed exceptional mechanical properties, including a high hardness of approximately 23.2 GPa, toughness indices of H/E = 0.096 and H3/E2 = 0.216 GPa, a low friction coefficient around 0.18, a wear rate as low as ∼1.09 × 10−5 mm3 N−1 m−1, and a corrosion current density of approximately 1.08 × 10−9 A/cm2. The coating's superior tribological characteristics and corrosion resistance can be attributed to two main factors. The enhanced hardness and toughness indices (H/E and H3/E2) contributed to its improved deformability, which is essential for wear resistance. Secondly, the presence of a graphite layer formed during friction provided self-lubrication, further reducing wear. Additionally, the chemical inertness of both the amorphous SiC and the amorphous carbon phases within the nanocomposite structure significantly bolstered the coating's resistance to corrosion. The AlSiC nanocomposite coatings deposited by FCVA exhibit outstanding mechanical properties, tribological performance, and corrosion resistance, making them highly suitable for applications in environments where wear and corrosion are significant concerns.

Study on the sand erosion resistance of ZrN and ZrAlSiN coatings

Brittle spalling is a crucial problem for hard ceramic coatings under high-angle sand erosion, especially for traditional binary nitride coatings such as ZrN. Here, we deposited the ZrAlSiN coating by co-doping Al and Si into the ZrN coating to improve the toughness and erosion resistance. ZrN coating was also prepared on Ti6Al4V substrates by magnetic filtration cathode vacuum arc technology (FCVA) under the same process for contrast. The microstructure, mechanical properties, and sand erosion resistance of ZrN and ZrAlSiN coatings were studied. The ZrAlSiN coating contains nanocrystalline ZrAlN and amorphous Si3N4. The results show that the ZrAlSiN coating exhibits the highest H, H/E, H3/E2, and Welastic/Wplastic among as-deposited coatings with the value of ~30.8Gpa, ~0.12, ~0.43Gpa, and 2.19, respectively. The erosion rate of the ZrAlSiN coating is about half that of the ZrN coating. The dopping of Si element is conducive to inhibition of the grain growth. The enhanced toughness while maintaining high hardness is one of the main reasons for the better anti-sand erosion performance of ZrAlSiN coatings. The research helps promote the application of ZrN-based coatings in the field of anti-sand erosion.

Synthesis of Ag-Doped Tetrahedral Amorphous Carbon Coatings and Their Antibiofilm Efficacy for Medical Implant Application.

Tetrahedral amorphous carbon (taC) is a hydrogen-free carbon with extensive properties such as hardness, optical transparency, and chemical inertness. taC coatings have attracted much attention in recent times, as have coatings doped with a noble metal. A known antimicrobial metal agent, silver (Ag), has been used as a dopant in taC, with different Ag concentrations on the Ti64 coupons using a hybrid filtered cathodic vacuum arc (FCVA) and magnetron sputtering system. The physiochemical properties of the coated surface were investigated using spectroscopic and electron microscopy techniques. A doping effect of Ag-taC on biofilm formation was investigated and found to have a significant effect on the bacterial-biofilm-forming bacteria Staphylococcus aureus and Pseudomonas aeruginosa depending on the concentration of Ag. Further, the effect of coated and uncoated Ag-taC films on a pathogenic bacterium was examined using SEM. The result revealed that the Ag-taC coatings inhibited the biofilm formation of S. aureus. Therefore, this study demonstrated the possible use of Ag-taC coatings against biofilm-related complications on medical devices and infections from pathogenic bacteria.

Nanomechanical inhomogeneities in CVA-deposited titanium nitride thin films: Nanoindentation and finite element method investigations

Refractory metals that can withstand at high temperatures and harsh conditions are of utmost importance for solar-thermal and energy storage applications. Thin films of TiN have been deposited using cathodic vacuum arc deposition at relatively low temperatures ∼300 °C using the substrate bias ∼ −60 V. The nanomechanical properties of these films were investigated using nanoindentation and the spatial fluctuations were observed. The nanoindentation results were simulated using finite element method through Johnson-Cook model. A parametric study was conducted, and 16 different models were simulated to predict the hardening modulus, hardening exponent, and yield stress of the deposited film. The predicted values of elastic modulus, yield stress, hardening modulus and hardening exponent as 246 GPa, 2500 MPa, 25000 MPa and 0.1 respectively are found to satisfactorily explain the experimental load-indentation curves. We have found the local nitridation plays an important role on nanomechanical properties of TiN thin films and confirms that the nitrogen deficient regions are ductile with low yield stress and hardening modulus. This study further opens the opportunities of modelling the nanoscale system using FEM analysis.

The inner workings of sp2 clusters in nitrogen-incorporated tetrahedral amorphous carbon thin films according to optical analyses

The conduction mechanism in nitrogen-incorporated tetrahedral amorphous carbon (ta-C: N) thin films is mainly attributed to the conjugation in sp2 clusters. Here, ta-C:N thin films (about 100 nm) were deposited by laser controlled pulsed cathodic vacuum arc (Laser-Arc) at different nitrogen gas flow rates to investigate the electrical properties of such films. Mechanical and structural properties indicate an increase in sp2 fraction with a rise in nitrogen incorporation into the deposited films. However, after an initial decrease in electrical resistivity, it plateaus at higher flow rates while the sp2 content is still rising. Hence, to gain better understanding of the electronic properties, the dielectric constants ε1 and ε2 were obtained from the optical constants [n] and [k], which were numerically determined from reflectance [R] and transmittance [T] measurements in the wavelength range from 190 to 2500 nm (0.5 to 6.5 eV). The dielectric constant ε1 was used to calculate the dielectric volume of the atom, which is interpreted as a measure of the conjugated π electron system. Furthermore, modeling of the dielectric constants yielded the number of conjugated electrons per atom. Through the dielectric volume and number of conjugated electrons, it was discovered that the electrical conductivity does not only depend on the sp2 content and cluster size, but on how many electrons are conjugated and how much space these electrons occupy. The ta-C:N samples with the highest electrical conductivity, were either characterized by the largest occupied volume or the highest number of conjugated electrons.

Tuning the plasmonic resonance in TiN refractory metal

Plasmonic coatings can absorb electromagnetic radiation from visible to far-infrared spectrum for the better performance of solar panels and energy saving smart windows. For these applications, it is important for these coatings to be as thin as possible and grown at lower temperatures on arbitrary substrates like glass, silicon, or flexible polymers. Here, we tune and investigate the plasmonic resonance of titanium nitride thin films in lower thicknesses regime varying from ~ 20 to 60 nm. High-quality crystalline thin films of route-mean-square roughness less than ~ 0.5 nm were grown on a glass substrate at temperature of ~ 200 °C with bias voltage of − 60 V using cathodic vacuum arc deposition. A local surface-enhanced-plasmonic-resonance was observed between 400 and 500 nm, which further shows a blueshift in plasmonic frequency in thicker films due to the increase in the carrier mobility. These results were combined with finite-difference-time-domain numerical analysis to understand the role of thicknesses and stoichiometry on the broadening of electromagnetic absorption.

High temperature tribological properties of TiAlSiN/NiCr multilayer coatings with different modulation periods

In this work, TiAlSiN/NiCr multilayer coatings with different modulation periods were deposited by cathodic-arc techniques, which combined filtered cathode vacuum arc (FCVA) and cathodic-arc ion plating (CAIP) techniques to deposit sublayers at different bias voltages. The nanoscale multilayer coating (TiAlSiN: 88 nm; NiCr: 9 nm) exhibited excellent oxidation resistance and thermal stability. Annealed coatings at 900 °C in air for 1 h, the thickness of the oxide layer of N32 coating is only 0.91 μm and the increase in coating thickness was only 9.01%, while the thickness of oxide layer of monolayer TiAlSiN coating is 3.02 μm and thickness increasing of 122.28%. Due to the existence of numerous interfaces, the N32 coating exhibited the lowest wear rate of 1.92 × 10−7 mm3N−1m−1 at 600 °C under abrasive wear and adhesive wear mechanisms. In parallel, a new AlNi intermetallic compound with excellent thermal stability was characterized by high-resolution transmission electron microscopy (HRTEM) at the coating interfaces. This compound is derived from different cathodic-arc techniques and bias voltages used to deposit coatings, which provides a reference for the structural design of coatings facing thermal environments.

The Influence of Nitrogen Partial Pressure on the Microstructure and Mechanical Properties of HfNbTaTiVZr High-Entropy Nitride Coating Deposited via Direct Current Cathodic Vacuum Arc Deposition

In recent years, high-entropy alloys have attracted increasing scientific interest. Due to their promising combination of properties, such as high hardness and high temperature stability, they are attractive for use as tool coatings for machining applications, to give but one example. Previous studies often focused on layer deposition using magnetron sputtering. Comparatively little research has been carried out to date on coating deposition using direct current cathodic vacuum arc deposition (CAE), with higher achievable rates and almost completely ionized plasmas. The aim of this work is to investigate (HfNbTaTiZr)N-coatings produced by CAE. The nitrogen content was varied and the effects on the coating properties were investigated. Changing the N2/(N2 + Ar) ratio between 0.1 and 1.0 and varying the working pressure in the chamber from 2 Pa to 5 Pa resulted in variations of the nitrogen content of the coatings, ranging from 30 at% to 50 at%. Although different microstructures of the coatings were obtained, there was only a minor influence on the hardness and Young’s modulus.

Effects of Al and Si elements on oxidation behavior in 1000–1200 °C steam for PEO/CrAlSi composite coating on Zr alloy

A PEO/CrAlSi composite coating of ~10 μm thick on Zr–2 alloy was prepared by duplex plasma electrolytic oxidation (PEO) and filtered cathode vacuum arc deposition (FCVAD) techniques. The high temperature steam oxidation behavior of bare and PEO/CrAlSi–coated Zr alloys was performed in 1000–1200 °C. Their morphologies, microstructures, compositions and phase components were analyzed by scanning electron microscopy (SEM), transmission electron microscopy (TEM), X–ray diffraction (XRD) and glow discharge optical emission spectrometer (GDOES). The effects of Al and Si elements on multilayers microstructure evolution of coated Zr–2 alloy at steam atmosphere were discussed. It was found that the composite coating significantly improved the high–temperature steam oxidation resistance of Zr–2 alloy. The mass gains of the PEO/CrAlSi–coated Zr–2 alloy after 3600 s exposure in 1000 °C, 1100 °C and 1200 °C steam were 28 %, 29 % and 44 % of the bare alloy. Through the oxidations, Al diffused both inward and outward to the substrate and the surface regions, respectively. Formation of a top oxide layer (Al2O3, Cr2O3) greatly suppressed the inward oxygen diffusion. The Si enrichment in the PEO interlayer formed a Zr2Si layer, which inhibited the Cr-Zr interdiffusion at 1000 °C and 1100 °C. At 1200 °C, the Zr2Si layer was oxidized and the CrZr2 phase was formed in the Zr alloy substrate especially at the β–Zr/α–Zr(O) interface.

Influence of ferrum film by FCVA deposition technique on properties of WE43 magnesium alloy

WE43 alloy was successfully coated with ferrum (Fe) films of varying thicknesses using filtered cathode vacuum arc technology. The physical phase composition, surface morphology, corrosion resistance and mechanical properties of the films were extensively investigated. The results demonstrate that a deposition time of 20 min for Fe ions exhibits minimal defects and low surface roughness. Compared to the WE43 substrate, the Fe20 alloy exhibits lower Icorr values at 81 μA/cm2, indicating enhanced corrosion resistance. Immersion experiments further confirm the superior integrity of the Fe20 film compared to other coated alloys tested. Notably, among all deposited modified alloys, Fe20 demonstrates significantly improved mechanical properties with its hardness and elastic modulus being three times higher than those of WE43, providing better wear resistance.

EFFECT OF PULSED SUBSTRATE BIAS ON THE STRUCTURE AND PROPERTIES OF NITRIDE COATINGS DEPOSITED BY FILTERED CATHODIC ARC PLASMA

The results of studies of nitride coatings deposited using a cathodic vacuum arc plasma source with a rectilinear type filter are presented. The effect of parameters of high voltage substrate bias pulses on the deposition rate, composition, structure and mechanical properties of coatings based on TiN and CrN, including multi-component ones with the additions of Al, Si, Zr, Y, Re, Nb, Hf, was analyzed. With different regimes of bias potential the formation of coatings with a nanocrystalline cubic structure (of the NaCl type) and close to stoichiometric nitrogen content and high hardness of 25…36 GPa is ensured. It was found that changing the amplitude, duration and frequency of pulses allows to effectively controlling the morphology, size of crystallites, texture and stress level in coatings, which effects their mechanical properties. The use of a pulse bias potential with an amplitude of 1…2 kV, a frequency of 10…20 kHz and duty cycle of 10…15% makes it possible to form a homogeneous dense nanostructure with a [110] or [100] texture, an optimal stress level 4…5 GPa and a smooth surface in coatings of different compositions. It is shown that such a structure provides improved resistance of coatings to various types of wear. Unequivocal correlations were not found between the hardness of the coatings, the modulus of elasticity and their wear.

Development of Ti/Ti-DLC multilayers on magnesium alloys. Part 1: Microstructure and mechanical properties

To improve both the corrosion resistance and wear resistance of magnesium alloys, titanium-diamond-like carbon (Ti-DLC) monolayer and Ti/Ti-DLC multilayer films with two periods were applied to AZ31 magnesium alloys through filter cathodic vacuum arc deposition technology. The Ti-DLC monolayer film exhibited an amorphous structure doped with TiC nanocrystals. After introducing the Ti sublayer, the Ti/Ti-DLC multilayer films exhibited a layered structure, resulting in improved adhesion strength and fracture toughness and lower hardness. Compared with the (Ti/Ti-DLC)4 multilayer film with a smaller period, the (Ti/Ti-DLC)2 multilayer film with a lager period exhibited better adhesion strength, higher fracture toughness, hardness, ID/IG ratio, and lower residual stress owing to its thicker Ti sublayers.

Development of Ti/Ti-DLC multilayers on magnesium alloys — Part 2: Corrosion and wear resistance

To improve corrosion and wear resistance of magnesium alloy, the Ti-DLC monolayer and Ti/Ti-DLC multilayer films were deposited on AZ31 magnesium alloys by filter cathodic vacuum arc deposition technology. All coatings showed good corrosion and wear resistance, and low friction coefficient. The corrosion resistance of the coated samples, from high to low, was Ti/Ti-DLC)2 multi coated-, Ti-DLC mono coated-, and Ti/Ti-DLC)4 multi coated samples. That is because the good toughness and film/substrate deformation coordination of multilayer films were beneficial for improving the corrosion resistance of coating, but the thinner Ti sublayer increased the risk of corrosion liquid penetrating the coating. Under friction test under 5 N load for 30 min, the Ti-DLC monolayer film showed best wear resistance with lowest wear rate as its combination effects of high hardness and good toughness. Whereas, under higher load, the higher toughness and film/substrate deformation coordination of multilayer films played a more positive role in its wear life. Under load of 10 N, comparing to the Ti-DLC monolayer film, the (Ti/Ti-DLC)4 multi and (Ti/Ti-DLC)2 multi films improved wear life by 15 % and 36 %, respectively. The (Ti/Ti-DLC)2 multi film had the best corrosion resistance and wear life.