The structural, electrical and optical properties of molybdenum oxide (MoOx) thin films prepared by magnetron sputtering are studied with annealing temperature. The interface properties of silicon with the intrinsic amorphous silicon (a-Si:H(i)) and alumina (AlOx) passivation layers are investigated by the minority carrier lifetime and implied-Voc (iVoc). The AlOx shows the better passivation properties and thermal stability for the carrier-selective contact solar cells. The Ce-doped In2O3(ICO) is deposited on the surface of MoOx thin films. It is found that the optimized annealing temperature is 125 °C for the carrier selective contact solar cells with the a-Si:H(i) passivation layer. It could increase to 175 °C for the AlOx passivation layer.
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