An exact calculation of N2+ and H2+ influx, at cathode surface in N2–H2 discharge, has been derived using electron impact ionization cross-section at plasma sheath boundary. The analytical formula is very convenient in practical applications. Through the analysis of experimental parameters for glow discharge plasma nitriding, the formula explains, why treatment in an N2–H2 mixture with H2 percentage ∼70% gives most enhanced result.
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