Benzene Vapor Research Articles

The influence of Rh-doped SnO2 microspheres on the sensitivity of benzene detection

In this article, Rh-doped SnO2 microspheres were prepared by a convenient hydrothermal treatment. Compared with the non-doped SnO2 microspheres, the Rh-doped SnO2 microspheres had larger specific surface area, faster electron transfer rate and increased oxygen vacancies, which is beneficial to improve the gas sensitivity of the material. The optimal sensitivity was observed of Rh-0.1 at 250 °C, and the response-recovery time of Rh-0.1 were 46 and 25 s, respectively. Besides, the Rh-doped SnO2 microspheres exhibited excellent gas selectivity and stability to benzene vapor. The novel Rh-doped SnO2 microspheres are potential gas detection materials for accessing benzene vapor.

Investigating the Dynamics of a Soft Crystalline Covalent Organic Framework during Benzene and Cyclohexane Adsorption by in situ Powder X‐ray Diffraction

Due to their similar boiling points, separation of benzene and cyclohexane mixtures is among the current challenging processes faced by the petrochemical industry. As recently assessed, the soft imine‐based covalent organic framework [(TAM)(BDA)2] (COF‐300; TAM = tetrakis(4‐aminophenyl)methane, BDA = terephthaldehyde) possesses higher affinity for benzene than cyclohexane in both static conditions at 298 K and dynamic conditions in the range of 298–348 K. As shown in this contribution, in situ powder X‐ray diffraction while dosing benzene and cyclohexane vapors in the range of 0.01–4.74 bar on the narrow‐pore form of COF‐300 confirmed the coherent switchability of its framework, unveiling the progressive formation of different intermediate‐ and large‐pore forms. In addition, a basket of otherwise inaccessible key crystallochemical details—“on/off” structural‐feature changes cooperating to adsorption, primary adsorption sites, and host–guest and guest–guest interactions—was successfully retrieved. Overall, these findings allowed to shed light on the framework dynamics underneath the previously observed selectivity toward benzene over cyclohexane, completing this case of study and providing relevant information for the design of new‐generation adsorbents for this applicative context.

A novel Al-based MOF with straight channel and pocket pore structure for trace benzene adsorption and benzene/cyclohexane separation

Benzene (Bz) vapor poses significant health risks to humans, even at trace concentrations. Additionally, the separation and recycling of Bz and cyclohexane (Cy) is challenging due to their similar kinetic diameters and boiling points. Developing an adsorption-separation material with stronger interactions with Bz than with Cy could serve as a viable strategy for trace Bz adsorption and Bz/Cy separation. In this study, we present a novel aluminum-based metal–organic framework, ZJU-521(Al), composed of tetrakis (4-carboxyphenyl)methane and a helical chain [Al5(OH)7(−COO)8]∞, featuring a simple network of one-way rods and tetrahedra. This framework exhibited a uniform micropore size of 7.23 Å and a specific surface area of 1,248 m2 g−1, demonstrating excellent trace Bz adsorption (4.18 mmol g−1) at P/P0 = 0.01, attributed to its straight channel and orthogonal-array pocket pore structure. The ideal adsorbed solution theory selectivity and separation factor values of ZJU-521(Al) for Bz/Cy were 22.50 and 6.20, respectively, indicating its potential as a material for Bz/Cy separation. Multicomponent simulations showed that Bz molecules were preferentially adsorbed in the pocket due to stronger interactions, such as Al–π interactions. Thus, ZJU-521(Al) exhibits stronger interactions with Bz than with Cy, facilitating effective Bz/Cy separation.

Fabrication, evaluation, and mechanism of TPU nanocomposites containing MWCNTs–Fe2O3 hybrid conductive nanofillers for selective VOC sensing applications

AbstractVolatile organic compounds (VOCs) are highly harmful substances that can bring serious harm to the environment and human health. In this work, thermoplastic polyurethane (TPU) conductive nanocomposite sensors for selective gas sensing of VOCs were designed and fabricated using electrospun TPU fibers as templates and MWCNTs–Fe2O3 as conductive hybrid nanofillers through a homogeneous liquid impregnation method. The microstructure of TPU matrix fibers and the TPU nanocomposites, and their gas‐sensitive response performance to various VOCs, were investigated. The formation of MWCNTs–Fe2O3 nanofillers was confirmed by Fourier transform infrared spectroscopy, X‐ray diffraction, and Raman analysis. Field emission scanning electron microscope showed that MWCNTs–Fe2O3 nanofillers were uniformly coated on the surface of TPU, forming effective and complete conductive networks. The average volume resistivity of TPU nanocomposites (containing 4.76 wt% MWCNTs–Fe2O3) was reduced from 1.5 × 1012 Ω·mm in pure TPU matrix fiber to 2.93 × 105 Ω·mm. Gas‐sensitive performance tests with 500 ppm of ether, ammonia, formaldehyde, ethanol, xylene, toluene, benzene vapor, and acetone showed that the response value of TPU/MWCNTs–Fe2O3 nanocomposites to ether was 85.7%, and the resistance ratio of desorption to the initial one was 1.01, which was almost a complete recovery. In addition, the gas response values of TPU nanoconductive composites under different humidity environments show better stability.Highlights Novel TPU composites contain MWCNTs–Fe2O3 conductive nanofillers were proposed. Synthesized TPU nanocomposite fibers by electrospinning and liquid dip methods. TPU nanocomposite sensors combine fast response, selectivity, and repeatability. TPU nanocomposites exhibited high gas‐sensitive response selectivity to ether.

LaCoO3 is a promising catalyst for the dry reforming of benzene used as a surrogate of biomass tar.

Tar build-up is one of the bottlenecks of biomass gasification processes. Dry reforming of tar is an alternative solution if the oxygen chemical potential on the catalyst surface is at a sufficient level. For this purpose, an oxygen-donor perovskite, LaCoO3, was used as a catalyst for the dry reforming of tar. To circumvent the complexity of the tar and its constituents, the benzene molecule was chosen as a model compound. Dry reforming of benzene vapor on the LaCoO3 catalyst was investigated at temperatures of 600, 700, and 800 °C; at CO2/C6H6 ratios of 3, 6, and 12; and at space velocities of 14,000 and 28,000 h-1. The conventional Ni(15 wt.%)/Al2O3 catalyst was also used as a reference material to determine the relative activity of the LaCoO3 catalyst. Different characterization techniques such as X-ray diffraction, N2 adsorption-desorption, temperature-programmed reduction, and oxidation were used to determine the physicochemical characteristics of the catalysts. The findings demonstrated that the LaCoO3 catalyst has higher CO2 conversion, higher H2 and CO yields, and better stability than the Ni(15 wt.%)/γ-Al2O3 catalyst. The improvement in activity was attributed to the strong capacity of LaCoO3 for oxygen exchange. The transfer of lattice oxygen from the surface of the LaCoO3 catalyst facilitates the oxidation of carbon and other surface species and leads to higher conversion and yields.

The room temperature ethanol gas sensors based on MoS2-CuGaO2 composite prepared by hydrothermal method

In this paper, MoS2-CuGaO2 composites were successfully synthesized by hydrothermal method. The composites were characterized by X-ray diffraction (XRD), Scanning electron microscopy (SEM), transmission electron microscopy (TEM), Fourier transform infrared (FTIR), X-ray photoelectron spectroscopy (XPS), respectively. The specific surface area and pore size distribution were obtained by N2 adsorption-desorption isotherms. The gas sensing property measurements were conducted. The sensitivity of pure CuGaO2 based gas sensor to 100 ppm acetic acid and benzene vapor was 1.4 at 25oC. The sensitivity of MoS2-CuGaO2 composite (M − 5) was 6.0 towards 100 ppm ethanol vapor at 25oC. And the detection limit of MoS2-CuGaO2 (M − 5) based sensor was 0.1 ppm. The results demonstrated that MoS2 had effect on the selectivity and sensitivity of the MoS2-CuGaO2 composites. M − 5 composite is considered to be promising for ethanol sensing application in room temperature.

Visible light enhanced selective benzene response of hexagonal atomic structured CuS microcloves

We have reported CuS microcloves (MCs) for highly selective detection of benzene using scanning kelvin probe (SKP) technique. The electron microscopy investigations revealed the formation of clove shaped CuS with a size of about 1–2 µm at 180 °C and 6 h. The time of reaction significantly affected the crystallinity as well as the morphology of resulting CuS materials. The investigations on adsorption behavior of different types of common volatile organic compounds (VOCs) with varying charge and nature revealed an outstanding selectivity towards benzene when compared to other VOCs. The difference in work function between gold tip and sensor surface modified with CuS MCs was decreased under the exposure of light, most likely caused by transfer of electrons to conduction band of CuS under illumination of light. As a result, the CuS MCs showed enhanced photo response in visible light exposure in the presence of benzene. A chemiresistive type sensor device was fabricated using CuS MCs and exposed to benzene vapor in a concentration ranging from 2.8 to 11.2 ppm. The sensitivity was found to be 1.63 × 10-3 ppm−1. Notably, a rapid response time of ∼6 s and recovery time of ∼ 16 s was achieved for the sensor at a benzene concentration of 5.6 ppm at room temperature. Also, considerable and repeatable sensor response was observed for 560 ppb of benzene vapor at 70 °C. Hence, these results suggested that the CuS MCs have huge potential as novel material for selective benzene detection in gas phase towards breath analysis and other environmental monitoring.

Gamma irradiated Cu-doped TiO2 nanoparticles for selective ammonia sensing

In this research, the effect of gamma ray doses on volatile organic compound (VOC) sensing properties of Cu doped TiO2 nanoparticles are studied to further improve the VOC sensing performance. Pure and Cu doped TiO2 nanoparticles have been prepared by sol-gel technique on Au interdigitated plexiglas substrate and irradiated by gamma-rays with doses varying from 1 to 150 KGy. The irradiation was performed by using 60Co as gamma source. The structural, morphology and modifications were analyzed with X-ray diffraction (XRD), scanning electron microscopy (SEM), and Atomic Force Microscopy (AFM) techniques. The sensing performance of these films toward ethanol, methanol, 2-propanol, benzene, toluene, xylene and ammonia vapors has been tested. It was observed that no remarkable sensor response to any vapors except ammonia was observed at room temperature. Changes in sensor’ ammonia sensitivity have been correlated with the gamma radiation dose and Cu doping ratio. Maximum sensing performance was observed with 3% Cu doped TiO2 exposed to gamma radiation dose of 150 kGy.

Thermodynamically and Kinetically Enhanced Benzene Vapor Sensor Based on the Cu-TCPP-Cu MOF with Extremely Low Limit of Detection.

As a carcinogenic and highly neurotoxic hazardous gas, benzene vapor is particularly difficult to be distinguished in BTEX (benzene, toluene, ethylbenzene, xylene) atmosphere and be detected in low concentrations due to its chemical inertness. Herein, we develop a depth-related pore structure in Cu-TCPP-Cu to thermodynamically and kinetically enhance the adsorption of benzene vapor and realize the detection of ultralow-temperature benzene gas. We find that the in-plane π electronic nature and proper pore sizes in Cu-TCPP-Cu can selectively induce the adsorption and diffusion of BTEX. Interestingly, the theoretical calculations (including density functional theory (DFT) and grand canonical Monte Carlo (GCMC) simulations) exhibit that benzene molecules are preferred to adsorb and array as a consecutive arrangement mode in the Cu-TCPP-Cu pore, while the TEX (toluene, ethylbenzene, xylene) dominate the jumping arrangement model. The differences in distribution behaviors can allow adsorption and diffusion of more benzene molecules within limited room. Furthermore, the optimal pore-depth range (60-65 nm) of Cu-TCPP-Cu allows more exposure of active sites and hinders the gas-blocking process. The optimized sensor exhibits ultrahigh sensitivity to benzene vapor (155 Hz/μg@1 ppm), fast response time (less than 10 s), extremely low limit of detection (65 ppb), and excellent selectivity (83%). Our research thus provides a fundamental understanding to design and optimize two-dimensional metal-organic framework (MOF)-based gas sensors.

Insight into hematological parameters of petrol station workers.

Benzene is one of the major carcinogenic factors that can affect liver, kidneys, and lungs. Chronic inhalation of benzene vapor by petrol stations workers has been shown to have an impact on hematological parameters; thus, the present study aimed to investigate the effect of benzene exposure on petrol station workers. The study involved 99 participants, 50 of whom have been exposed to benzene and 49 of whom have not (control). A 5 ml blood sample in an ethylenediaminetetraacetic acid (EDTA) anticoagulant tube was collected from each subject, and a complete blood count test was used to test hematological parameters. The current study showed a significant decrease in red blood cells, packed cell volume, and hemoglobin in the exposed group compared to the control group. However, the amount of white blood cells was significantly increased (p < 0.0001) in the exposed group compared to the control group. Notably, there was no significant difference in platelet counts between the two groups. In terms of exposure time, subjects who have been exposed to benzene for more than a year and fewer than 10 years showed a significant decrease (p < 0.05) in RBCs indices and a significant increase (p < 0.0001) in WBCs compared to those in the control group CONCLUSIONS: Thus, the findings indicated that significant differences in hematological parameters were found in workers who were exposed to benzene compared to those who had not been exposed.

Enhanced benzene vapor adsorption through microwave-assisted fabrication of activated carbon from peanut shells using ZnCl2 as an activating agent

Herein, microwave-assisted activated carbon (MW-AC) was fabricated from peanut shells using a ZnCl2 activator and utilized for the first time to eliminate benzene vapor as a volatile organic compound (VOC). During the MW-AC production process, which involved two steps—microwave treatment and muffle furnace heating—we investigated the effects of various factors and achieved the highest iodine number of 1250 mg/g. This was achieved under optimal operating conditions, which included a 100% impregnation ratio, CO2 as the gas in the microwave environment, a microwave power set at 500 W, a microwave duration of 10 min, an activation temperature of 500 °C and an activation time of 45 min. The structural and morphological properties of the optimized MW-AC were assessed through SEM, FTIR, and BET analysis. The dynamic adsorption process of benzene on the optimized MW-AC adsorbent, which has a significant BET surface area of 1204.90 m2/g, was designed using the Box-Behnken approach within the response surface methodology. Under optimal experimental conditions, including a contact duration of 80 min, an inlet concentration of 18 ppm, and a temperature of 26 °C, the maximum adsorption capacity reached was 568.34 mg/g. The experimental data are better described by the pseudo-second-order kinetic model, while it is concluded that the equilibrium data are better described by the Langmuir isotherm model. MW-AC exhibited a reuse efficiency of 86.54% for benzene vapor after five consecutive recycling processes. The motivation of the study highlights the high adsorption capacity and superior reuse efficiency of MW-AC adsorbent with high BET surface area against benzene pollutant. According to our results, the developed MW-AC presents itself as a promising adsorbent candidate for the treatment of VOCs in various industrial applications.

Metal-Organic Framework Based Sensors for Benzene Vapor.

Sensing of benzene vapor is a hot spot due to the volatile drastic carcinogen even at trace concentration. However, achieving convenient and rapid detection is still a challenge. As a sort of functional porous material, metal-organic frameworks (MOFs) have been developed as detection sensors by adsorbing benzene vapor and converting it into other signals (fluorescence intensity/wavelength, chemiresistive, weight or color, etc.). Supramolecular interaction between benzene molecules and the host framework, aperture size/shape and structural flexibility are influential factors in the performance of MOF-based sensors. Therefore, enhancing the host-guest interactions between the host framework and benzene molecules, or regulating the diffusion rate of benzene molecules by changing the aperture size/shape and flexibility of the host framework to enhance the detection signal are effective strategies for constructing MOF-based sensors. This concept highlights several types of MOF-based sensors for the detection of benzene vapor.

Fabrication of one-dimensional porous p-type Co3O4 rods-based sensors for ultra-high sensitivity and selectivity towards benzene vapour

This study reports on the noble gas sensing properties of Co3O4 nanostructures for the detection of benzene vapour at a low functional temperature of 75 ˚C. The Co3O4 nanostructures were synthesized hydrothermally at different reaction temperatures ranging from 120 ˚C to 220 ˚C. Surface morphology analysis of the nanostructures revealed the formation of 1-D mesoporous nanorods at lower reaction temperatures, i.e., 120 ˚C and 140 ˚C, while synthesis at higher temperatures disintegrated the nanorods and formation of agglomerated plate-like and block-like nanostructures was observed. Among the Co3O4 nanostructures, 1-D nanorods synthesized at 140 ˚C demonstrated a notable response of 361 towards 5 ppm benzene at 75 ˚C. In addition, the lowest theoretical detection limit of 1.9 ppb and sensitivity of 92 ppm−1 were observed for 1-D mesoporous nanorods. The reported ultra-sensitivity of the 1-D mesoporous nanorods is attributed to the porous surface that supplied numerous sites for adsorption/desorption of O2- ions and benzene molecules, the rod-like configuration of its crystallites that provided connecting pathways for efficient charge transportation and the catalytic oxidation of Co3O4 to benzene. Further analyses of the long-term stability of the sensor stored for 304 days and tested in dry air and under relative humidity were discussed in detail as well as the sensing mechanism induced by surface oxygen and benzene gas adsorption.

Separation of benzene and toluene associated with vapochromic behaviors by hybrid[4]arene-based co-crystals

The combination of macrocyclic chemistry with co-crystal engineering has promoted the development of materials with vapochromic behaviors in supramolecular science. Herein, we develop a macrocycle co-crystal based on hybrid[4]arene and 1,2,4,5-tetracyanobenzene that is able to construct vapochromic materials. After the capture of benzene and toluene vapors, activated hybrid[4]arene-based co-crystal forms new structures, accompanied by color changes from brown to yellow. However, when hybrid[4]arene-based co-crystal captures cyclohexane and pyridine, neither structures nor colors change. Interestingly, hybrid[4]arene-based co-crystal can separate benzene from a benzene/cyclohexane equal-volume mixture and allow toluene to be removed from a toluene/ pyridine equal-volume mixture with purities reaching 100%. In addition, the process of adsorptive separation can be visually monitored. The selectivity of benzene from a benzene/cyclohexane equal-volume mixture and toluene from a toluene/ pyridine equal-volume mixture is attributed to the different changes in the charge-transfer interaction between hybrid[4]arene and 1,2,4,5-tetracyanobenzene when hybrid[4]arene-based co-crystal captures different vapors. Moreover, hybrid[4]arene-based co-crystal can be reused without losing selectivity and performance. This work constructs a vapochromic material for hydrocarbon separation.

A nanoporous organic polymer using 1, 3-dibromoadamantane as a crosslinker for adsorption/separation of benzene and cyclohexane.

The development of nanoporous organic polymers with cycloaliphatic components for effective benzene (Bz) and cyclohexane (Cy) adsorption/separation poses a significant challenge. This work focuses on synthesizing NOP-Ad-1, a nanoporous organic polymer derived from a Friedel-Crafts reaction between cycloaliphatic 1,3-dibromadantane and aromatic hexaphenylbenzene. At 298 K and P/P0 = 0.95, NOP-Ad-1 can uptake 989 mg g-1 benzene and 441 mg g-1 cyclohexane. Moreover, as the benzene vapor ratio increased from 20% to 80%, the Bz/Cy selectivity of NOP-Ad-1 gradually decreased from 1.75 to 1.24. These findings highlight the potential application of NOP-Ad-1 in the adsorption/separation of Bz/Cy mixtures.

Использование отходов производств для сорбции токсичных газов

The purification of exhaust gases of some industries by solid wastes of other enterprises is promising and up-to-date in environmental protection. This paper presents the research results on purification of waste gases from ammonia and benzene by wastes from thermal power engineering (fly ash) and chemical industry (secondary polytetrafluoroethylene). Operation of heat power industry plants, which are powered by bituminous coal, results in producing fly ash which is to be stored in special ash ponds. Ash ponds occupy large areas and significantly burden the local ecosystem. Using ash in building, sound-absorbing, and heat insulating materials’ production reduces the volumes of ahs ponds. Fly ash can be used as a base for heterogeneous catalysts. Fly ash can also be used in zeolite production and for soil structure improvement. A number of studies provide positive results of wastewater treatment from oil products and heavy metal ions, as well as absorption of air sulfur(IV) oxide. We propose fly ash using as a sorbent for ammonia adsorbing from exhaust gases in nitric acid and nitrogen fertilizers production. The adsorbate can be applied as a fertilizer for acid soils. Secondary polytetrafluoroethylene is a co-product of polytetrafluoroethylene production. It can be converted into ultradisperse powder with particle sizes of 0.20–1.35 µm by method of exhaustive fluoridation; the powder applies to a sponge material. The resulting sorbent can be used to extract benzene vapors from the exhaust gases of industries using benzene, for example, as a solvent. Compared to activated carbon, the developed sorbent effectively removes benzene vapors from exhaust gases. Over time, the purification efficiency of heated gases decreases to almost zero. Presumably this is due to liquid benzene fraction condensation on the sorbent surface.

Functionalized hyper-cross-linked porous homopolymers of ring-substituted 1,3-diethynylbenzenes and their physisorption activity

An atom-economic one-step chain-growth coordination homopolymerization providing high yields of functionalized hyper-cross-linked polyacetylenes with a permanent micro/mesoporous texture and a BET area of up to 1062 m2/g is reported. Substituted 1,3-diethynylbenzenes used as monomers in this synthesis simultaneously provide both functionalization and hyper-cross-linking of the resulting products. The homopolymerization is highly compatible with the heteroatom groups of the monomers and allows the preparation of well-defined porous networks with a wide spectrum of univalent groups (–F, –Cl, –Br, –NO2, –COOCH3, –CH2OH, –COOH) present in the networks in a high content of 7.87 mmol/g. The physisorption activity of the prepared networks is significantly affected by the character of the functional groups. Functional groups generally increase the capacity of reversible CO2 capture. Networks with oxygen-containing groups show high and potentially application-interesting capacities of cyclic reversible capture of water vapour from the air (capacity up to 314 mg/g, at a relative humidity of 90 %). Halogenated networks, on the other hand, are highly active in the reversible capture of benzene vapour (capacity up to 971 mg/g at room temperature).

Improving the adsorption performance of non-polar benzene vapor by using lignin-based activated carbon.

Both indoor and outdoor contamination continually contain benzene vapor. It has primary concerns about long-term health risks to the living environment. Benzene is a crucial airborne pollutant in the environment due to its apparent acute toxicity, high volatility, and poor degradability. It is especially urgent to restrain benzene emissions due to the persistent concentration increase and stringent processes. Benzene adsorption is a highly efficient mechanism with low cost, low energy consumption, and a simple process. In this study, biomass-derived porous carbon materials (TCACs) were synthesized by pyrolysis activation combined with H3PO4, HNO3, and HCl. TCAC44 has the best activation conclusion, showing that surface area and pore volume were 1107 m2/g and 0.58 cm3/g treated with H3PO4 and so was chosen for subsequent benzene adsorption/desorption tests. The adsorption capacities of benzene for TCAC44 were increased from 58 mg/g for 35 °C + 95% RH to 121 mg/g for 25 °C + 15% RH and presented a higher adsorption capacity of benzene than TCAC101 and TCAC133. Otherwise, well recyclability of TCAC44 was revealed as the benzene adsorption capacity reductions were 22.49% after five adsorption-desorption cycles. Furthermore, the present study established the property-application relationships to promote and encourage future research on the newly synthesized innovative TCAC44 for benzene removal.

1D Mn coordination polymer derived from sulfanilic acid: Synthesis, structure, adsorption properties and Hirshfeld surfaces analysis

A one-dimensional Mn coordination polymer formulated; [Mn2(C6H7NO3S)2Cl4O4]n (1) (where = C6H7NO3S is sulfanilic acid) was synthesized via the hydrothermal method by reacting aqueous solutions of MnCl2·4H2O and sulfanilic acid. The X-ray studies demonstrate layered arrangement of monomers in the coordination polymer interconnected by weak hydrogen bonds. The vibrational frequencies of functional groups and bonds within the polymer were analyzed using infrared spectroscopy. The thermal degradation of the coordination polymer structure was studied under non-isothermal conditions in an argon atmosphere using thermogravimetric (TG) and differential thermal analysis (DTA), revealing a decomposition process occurring in four to five distinct stages. The sorption properties of the coordination polymer were investigated using N2 gas in an Autosorb IQ device at 77 K, resulting in a surface area of 318.4642 m²/g. Additionally, the sorption behavior of benzene and water vapor on the polymer was investigated at room temperature, yielding a result of 70.82 m²/g for benzene vapor and 172.66 m²/g for water vapor. The molecular fragment, [Mn2(C6H7NO3S)2Cl4O4] as the monomer unit are used for calculating the Hirshfeld surface of this compound that reveals strong N-H∙∙∙Cl intermolecular hydrogen bonding and π–π interactions.

Benzene vapor sensing performance of different phases of copper oxide (CuxOy) thin films

Three different phases of copper oxide can be grown by thin-film deposition techniques, which differ in the oxidation state of copper. However, few studies have focused on comparing and considering sensing performance of these phases. The current study scrutinizes the benzene vapor sensing properties of various phases of copper oxide that can be used for the development of sensing device based on CuxOy thin films. RF reactive sputtering technique was employed, and different phases of copper oxide (CuO, Cu2O, and Cu4O3) were grown by tuning the sputtering power and reactive gas. The samples with phases of CuO, Cu2O, and CuO/Cu2O showed the response to benzene at different operating temperatures while the sample with the Cu4O3 phase was not sensitive to target vapor. The results demonstrated that the device based on CuO thin film can be a promising candidate to detect benzene vapor due to its remarkable sensitivity, selectivity, and stability.