This paper introduces a high-precision RC oscillator circuit that is less affected by temperature and supply voltage. The circuit mainly consists of a bandgap reference voltage source, a low-voltage linear regulator, a low-pass filter, and a digital trim circuit, which reduces the circuit's sensitivity to temperature variations and achieves high stability of the oscillator frequency over a wide temperature range. Because of the current digital trimming technique, the circuit's ability to cope with the effects of frequency instability caused by process deviations is further enhanced.The simulation results show that the output center frequency accuracy is maintained within ±0.5% under the supply voltage range of 2.5V~5.5V, temperature range of -40?~125?, and different process corners. The RC oscillator has a high precision output frequency and can be used as a clock signal for a number of highly integrated and high precision applications.