The prerequisite for flexible magnetic electronic devices is the knowledge of the preparation technology of flexible magnetic films and the evolution of the film properties under strain. In this work, CoFeB amorphous ferromagnetic films with stripe domains were prepared on flexible polyimide (PI) substrates by oblique sputtering. The results show that oblique sputtering induces the formation of columnar crystal structure in CoFeB films, which increases the perpendicular magnetic anisotropy of the films, thus leading to the appearance of stripe magnetic domain structures. On this basis, the CoFeB films with stripe domains were processed on a microscopic scale to investigate the size effect and strain regulation on the microscopic domain structure of the magnetic films. The characterization of the magnetic domain structure shows that the stripe domain contrast is reduced by the striped structure prepared by lithography. The triangular, circular and ring patterns deflect the alignment of the stripe domain to different degrees. The experimental results show that the deflection of the stripe domains is caused by the anisotropy of the shapes produced by the different patterns and that the size of the microstructure needs to be close to the period of the stripe domains for the size effect to be significant. In addition, the strain-induced magnetoelastic anisotropy effectively rotates the orientation of the stripe domains, and the variation in domain contrast demonstrates that tensile/compressive strains vary the magnitude of the out-of-plane stray field of the film. Our results provide some insight into the modulation of the physical properties of flexible magnetic films.
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