Micro-Cathode Arc Thruster (μCAT) is an advanced electric propulsion system developed in the past decades to meet the maneuvering requirements of space microsatellites. However, the constraint on the its application is the short lifespan of the thruster. This is attributed to the conductive film, a key component of thruster discharge. In this study, we propose a measurement method for μCAT conductive film, and enables the evaluation of the evolution process of film thickness. The method is based on the four-probe resistivity testing theory and size effect fitting model, and establishes a method for characterizing the thickness and resistivity of μCAT conductive films. A comparison was made between the corrected resistivity test results of 1, 2, 5, and 10 μm film and the fitting results of the titanium film, revealing an error ofapproximately 10%. Additionally, a total of 2500 ignition experiments were conducted to verify the film thickness and resistance measurement of this method. This research serves as a valuable basis for the lifetime investigation of μCAT. Consequently, the thickness of the film progressively decreases with each discharge cycle, and the resistivity exhibits a corresponding increase due to the size effect. This method could be used as an effective method for exploring the μCAT lifespan and performance.