Molybdenum is now commercially available by three kinds of metallurgical techniques, which are electron beam melting, arc melting and sintering. In order to point out what differences occur in the observed surface impurities on each Mo sample manufactured by the above different metallurgical processes, an ion scattering spectrometer (ISS) is used as a diagnostic method of surface observation because it has very high sensitivity to the topmost layers of the solid sample. The observed surface impurities are C, O, Na, K, S and Fe. C, O and S are common impurities for each Mo sample. Na and K are observed mainly on the arc melted Mo sample. Fe is detected only on the electron beam melted one. Impurities such as Na, K, S and Fe are segregated from the bulk to the surfaces depending on sample temperature. C and O are supplied to the surface by adsorption of CO gas in the ultrahigh vacuum system. The sputtering cross sections of CO and O 2 gases on the Mo surface by He ion bombardment have been measured.