The dynamic stability analysis of microsystems is an important aspect in understanding the critical operating regions under different excitations. Present study proposes an observer-based adaptive back-stepping sliding mode controller (ABSMC) model to control and stabilize an electrostatically excited functionally graded microresonator. The dynamic model of a microsystem subjected to random disturbances is derived using modified couple stress theory and Euler–Bernoulli’s beam model. The effective material properties are obtained from Mori-Tanaka scheme and the equations of motion are derived using Hamilton principle and solved by Galerkin’s method. A trained neural network estimator predicts the disturbances and the adaptive back-stepping sliding mode controller is designed for improving the system stability. The results of the proposed controller are compared with conventional sliding mode control (SMC) and proportional-derivative (PD) control solutions and it is found that ABSMC reduces settling time and input control force by 52.42% and 88.40%, respectively, with minimal chattering. The proposed control methodology effectively extends the travelling range of FG microsystems within and beyond the pull-in voltage.
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