Acoustic Wave Devices Research Articles

Band edge modulation for high-performance LL-SAW resonators on LiNbO3/SiC by introducing an ultra-thin intermediate oxide layer

With the exploding demand of rapid information transmission, high-frequency acoustic filtering devices are becoming an immediate need. Longitudinal leaky surface acoustic wave (LL-SAW) devices with unique advantages can be a promising platform. In this paper, we introduce a 100 nm intermediate oxide layer into the X-cut lithium niobate on silicon carbide (LiNbO3/SiC) to improve the in-band performance of LL-SAW resonators. First, the dispersion curves of the structures are analyzed by finite element method. In this part, we successfully interpret the intrinsic low quality factor (Q) of LL-SAW on LiNbO3/SiC in general design, and predict the enhancement of Q by introducing an intermediate oxide layer without degradation on spurious response. Then, one port resonators considered in the simulation are fabricated and measured. As a result, enhancements in Bode Q among the whole passband are confirmed. Compared with devices state of art, resonators with leading performances are demonstrated. The fabricated resonators have peak-valley admittance ratio of 63.87 dB, Bode Q of ∼300 at fr and ∼530 at far, keff2of 15.66 % and phase velocity of 6187.3 m/s. Additionally, the resonant frequency of SH1 mode shifts to higher frequency. This work enables the design of next generation high frequency mobile communication filters.

Impacts of material design on heat dissipation and power handling of acoustic-wave devices based on bonding wafers

Heat dissipation in surface acoustic wave (SAW) devices has never been researched in detail previously. With the arrival of the 5G era, more SAW devices with more complicated structures such as bonding wafers need to be integrated, easily leading to heat accumulation, so investigating heat dissipation in SAW devices is now necessary and urgent. Learning from the thermal-management researches in other fields and considering the mechanism and properties of SAW devices, this work believes that optimizing material design is efficient for heat dissipation enhancement. Therefore, this work for the first time systematically investigates the impacts of material design on heat dissipation and power handling which is significantly influenced by heat dissipation, building up a thermal-management theory for SAW devices based on bonding wafers. This work proposes a theoretical thermal calculation method for SAW devices, building a model and coding a calculation program. This work develops an experimental method by which the impacts of material design on heat dissipation can be deduced from those on power handling, designing and fabricating band-8 duplexers based on bonding wafers with different material designs. This work reveals that SiO2 and epoxy both weaken heat dissipation and impair power handling, while Si, sapphire, and SiC can all be chosen as heat-sink materials. Cost-efficient Si is quite proper for supporting substrates, and metal bumps are effective for thermal dissipation. This work gives guidance on enhancements of heat dissipation and power handling, helping researchers manage thermal properties in SAW devices and promoting the development of 5G communication.

Versatile Standing Wave Generation Between Arbitrarily Oriented Surfaces Using Acoustic Metasurface Deflectors and Retroreflectors

Acoustic wave devices using standing wave configurations have gained interest in various fields like healthcare diagnostics and manufacturing. Their functionalities span from cell sorting to microscale fiber assembly through periodic acoustic pressure fields. Conventional methods usually require parallel acoustic emitters and reflective surfaces, producing constrained standing wave patterns. In this paper, an effective approach for creating versatile acoustic standing wave fields using an acoustic metasurface deflector and retroreflector is introduced. The deflector manipulates the direction of incoming acoustic waves coupled with the retroreflector to reflect these waves back to the source. The proposed design allows the creation of standing waves that are not constrained by the relative angles of the two surfaces involved and allows for customizable wave patterns beyond the standard limits with enhanced adaptability. The system's effectiveness is evaluated through computational simulations using finite element analysis and experimental validation based on a 3D‐printed prototype. Results suggest that versatile standing waves between arbitrarily oriented surfaces can be produced through the careful design of the metasurface deflector and retroreflector. This approach can improve the performance of standing wave applications in particle manipulation, thus broadening the range of practical implementations for ultrasound and acoustofluidic technologies.

Topologically protected bound modes in non-neighboring hexagonal lattices

In the last decade, the study of wave localization and guiding has gained a renewed interest thanks to the introduction of the concept of topological protection. Originally developed in the field of quantum mechanics, topological protection has successively inspired the search for its analogue in other physical domains, including elasticity. In this context, periodic hexagonal lattices have been proposed as ideal candidates to realize these concepts. In this work, we explore the dynamic behavior of discrete hexagonal lattices with third nearest neighbor connections. First, the formation and transition of multiple Dirac cones above a critical value of the relative stiffness between the first and third nearest neighbor connections is derived. Then, the formation of extremely localized modes (i.e., bound modes) at the interface between regions formed by lattices which are inverted copies of each other is demonstrated. Our results show that this localization derives from a type of interface satisfying a point reflection symmetry for which the considered chain decouples into two identical copies at the high symmetry point of the Brillouin zone. Our findings open novel avenues for topological waveguiding and confinement with potential applications in surface acoustic wave devices.

Modulation of Temperature Coefficient of Frequency of Surface Acoustic Wave Devices by Phase Velocity Dispersion

Modulation of Temperature Coefficient of Frequency of Surface Acoustic Wave Devices by Phase Velocity Dispersion

On-chip stimulated Brillouin scattering via surface acoustic waves

Surface acoustic wave devices are ubiquitously used for signal processing and filtering, as well as mechanical, chemical, and biological sensing and show promise as quantum transducers. While surface acoustic waves (SAWs) are primarily excited and driven using electromechanical coupling and interdigital transducers, there is a strong desire for novel methods that enable the coherent excitation and detection of SAWs all-optically interfacing with photonic integrated circuits. In this work, we numerically model and experimentally demonstrate SAW excitation in integrated photonic waveguides made from GeAsSe glass via backward stimulated Brillouin scattering (SBS). We measure a Brillouin gain coefficient of 203 W−1 m−1 for the surface acoustic resonance at 3.81 GHz, with a linewidth narrowed to 20 MHz. Experimental access to this new regime of SBS not only opens up opportunities for novel on-chip sensing applications by harnessing the waveguide surface but also paves the way for strong Brillouin interactions in materials lacking sufficient acoustic guidance in the waveguide core, as well as the excitation of SAWs in non-piezoelectric materials.

Bluestein–Gulyaev(B-G) waves in a piezo-thermoelastic half-space in the context of modified multi-phase-lag theory

In the years 1968–69, Bluestein and Gulyaev discovered a new kind of surface wave in a piezoelectric material known as B-G wave after their name. Although it was discovered in few decades ago, but till now, no work has been done related to B-G wave propagation based on modified multi-phase-lag theory. In the present work, the authors have investigated the propagation behavior of Bluestein-Gulyaev-type waves in a piezo-thermoelastic half-space in the context of modified multi-phase-lag theory. The normal mode technique is employed to obtain the principal variables, for example, displacements, temperature, electric potential, electric displacements, and thermo-mechanical stresses. The boundary conditions are adopted in such a way that the upper surface of the piezo-thermoelastic half-space is stress free and the half-space is implicated by a perfectly conducting electrode that is grounded (i.e., electrically short conditions at the free surface). Based on these boundary conditions, secular equations are derived for the proposed model. Some special cases have also been discussed, and it is found that the secular equation is in well-agreement with the pre-established thermoelasticity theory. Moreover, some analyses are made to highlight the important peculiarities of the problem. The mathematical framework of the present study is momentous for both theoretical and practical expositions for temperature sensors and piezoelectric surface acoustic wave (SAW) devices. Also present study helps the researchers who are engaged on this domain.

Interaction of acoustic waves with spin waves using a GHz operating GaN/Si SAW device with a Ni/NiFeSi layer between its IDTs.

A two port surface acoustic wave (SAW) device was developed to be used for the control and excitation via spin waves (SW). The structure was manufactured using advanced nanolithography techniques, on GaN/Si, enabling fundamental Rayleigh interdigitated transducer (IDT) resonances in GHz frequency range. The ferromagnetic resonance of the magnetostrictive Ni/NiFeSi layer placed between the IDTs of the SAW device can be tuned to the SAW resonance frequency by magnetic fields. Using structures with finger and interdigit spacing of 170 nm and 100 nm, fundamental Rayleigh IDT resonance frequencies of 6.4 and 10.4 GHz have been obtained. Coupling of SAW to SW was demonstrated through transmission measurements at the fundamental Rayleigh frequencies in a magnetic field, μ0H from -280 to +280 mT, at different angles (θ) between the SAW propagation direction and the magnetic field direction. For the 6.4 GHz resonator a maximum decrease of about 1.2 dB occurred in |S21|, at μ0H = 30 mT and at θ = 45. Time-gated processing of the frequency domain raw data was used to remove the direct electromagnetic cross talk and triple transit effects. Nonreciprocity associated to the coupling was analyzed for the two SAW structures. The quantitative influence of the magnetic field strength on the phase of the transmission parameters is also presented.

Nonlinear, elastic, piezoelectric, electrostrictive, and dielectric constants of lithium tantalate

Three third-order dielectric constants, 8 electrostrictive constants, 13 third-order piezoelectric constants, and 14 third-order elastic constants for lithium tantalate (LiTaO3) single crystals, which are mainly used in surface acoustic wave (SAW) devices, were determined as part of basic research to realize SAW devices with a low degree of nonlinearity. The third-order dielectric constants were determined by measuring the change in capacitance along selected directions when an alternating electric field was applied to the crystal. The electrostrictive constants were determined by measuring the change in capacitance when static stress was applied. Some of the piezoelectric constants were determined directly from the change in sound velocity due to the application of an alternating electric field, whereas others were obtained from the measured dielectric constants, electrostrictive constants, and the change in sound velocity due to an alternating electric field. In addition, the elastic constants (compliance) were determined using the three aforementioned determined nonlinear constants and the measured small-amplitude ultrasonic velocity change as a function of applied static stress. The measurements performed in the present study are more advanced than those reported for LiNbO3 single crystals in 1987 due to the adoption of the d-form nonlinear piezoelectric equation (instead of the e-form) and a higher degree of precision using dynamic measurement methods. The use of the d-form of the nonlinear piezoelectric equation allows many nonlinear constants to be determined independently from other nonlinear constants, eliminating measurement errors associated with these other constants. The d-form nonlinear constants obtained in the present study were converted to e-form constants to make them applicable to the analysis of nonlinear phenomena in piezoelectric devices.

The study of temperature properties of I.H.P. structure and its application for filters on surface acoustic waves

The results of investigation of temperature properties of I.H.P.-structures on multilayer lithium tantalate/silicon dioxide film/silicon substrate used to improve the characteristics of surface acoustic wave devices are presented. Finite element modeling of the test structures was performed in COMSOL software and the temperature frequency coefficient was calculated. A comparison of the calculated transmission coefficient of a resonator filter on a conventional 36°YX-cut lithium tantalate monocrystal substrate and an I.H.P.-filter at different temperature values is presented. The possibility of minimizing the temperature coefficient of frequency by selecting the thickness of the substrate layers is shown. Comparison of the obtained results with the known data showed good agreement. The practical significance consists in the use of modeling results and calculated parameters in the development of various classes of devices on multilayer substrates, including those with I.H.P.-structures.

Analysis of Heterostructure Formation of Abnormally Oriented Grains in Sputter-Deposited AlScN Films and Its Impact on Bulk Acoustic Wave Devices.

The presence of abnormally oriented grains (AOGs) in sputter-deposited aluminum scandium nitride (AlScN) films significantly degrades their physical properties, compromising the performance of bulk acoustic wave (BAW) devices. This study utilizes first-principles calculations to reveal that in tetrahedral wurtzite AlScN film-doped Sc atoms tend to aggregate at the second nearest-neighbor positions, forming dense ScN octahedral structures. The rock-salt (RS) ScN continued to grow due to further Sc aggregation. However, due to inadequate scandium flux, embryonic RS structures cannot be sustained, resulting in the nucleation of AOGs at the (111) faces of the octahedral ScN structure. Electron microscopy studies indicated that AOGs possess wurtzite structures and originate at tilted grain boundaries. These boundaries were characterized as RS ScN with more Sc atoms. This corroborated the theoretical predictions. BAW resonators and filters fabricated from sputter-deposited AlScN films demonstrate that AOGs degraded the piezoelectricity of AlScN, reducing the resonator's electromechanical coupling coefficient (Keff2). Measurements showed that AOG density increased from edge to center of the 8 in. wafer, resulting in a 3% decrease in average Keff2 in the resonators and a 137 MHz decrease in the filter bandwidth at 5 dB.

Love wave propagation in a smart composite structure of linear and exponential functionally graded porous piezoelectric material

Functionally graded materials (FGMs) have emerged as a promising avenue for enhancing the performance and longevity of surface acoustic wave (SAW) devices. This importance is gained due to gradual variation in functional properties of FGMs. In this paper, a mathematical model of a piezoelectric layer overlying a functionally graded porous piezoelectric (FGPP) layer resting on the elastic substrate is presented for the study of Love waves. The material parameters of the FGPP layer are considered to vary linearly and exponentially with the thickness of the layer. The solutions of governing equations corresponding to the FGPP layer are obtained by the Wentzel Kramers Brillouin (WKB) method. Dispersion equations are derived for both electrically open and shorted boundaries, linear and exponential gradation in both mechanical and electrical parameters, and for gradation in mechanical parameters alone as well. After numerical computation, dispersion curves are plotted to investigate the influence of wavenumber, type of gradation, extent of gradation, and type of boundaries on the phase and group velocity. The phase velocity decreases with wavenumber and is found more for linear gradation in comparison to exponential gradation. The electromechanical coupling factor is analyzed for different propagating modes of Love waves, in the case when gradation in mechanical properties is considered, the electromechanical coupling factor is greater than that when variation in both mechanical and electrical properties is considered. It is also observed that the tailoring of gradation can help to get the suitable value of the electromechanical coupling factor. The insights obtained from these findings can offer valuable contributions toward advancing the functionality and efficiency of SAW devices, there by bolstering their applicability in various technological domains.

Innovative surface acoustic wave devices: A solution for real time monitoring and self-cleaning cascade impactor

This paper presents a comparative study of three types of surface acoustic waves sensors used for particulate matter detection along with a theoretical study tackling the possibility to switch to innovative materials called Piezoelectric-on-Insulator. These sensors are placed in a cascade impactor as impaction plates. Monitoring their phase variation allows us to measure the quantity of fine particles present in the air with high accuracy. Until now, the sensors used in our prototype are built on quartz substrate and present a sufficient sensitivity to fine particles. One major concern in our application is the fouling of the sensor’s surface with particles upon long periods of exposure. This shaped our drive to develop a self-cleaning sensor relying on other substrates with stronger electromechanical coupling coefficient (k2) [1]. Hence, the aim of this study is to demonstrate the possibility of using strongly coupled modes on different piezoelectric substrates for an accurate PM detection. Among these, different POI substrates are considered to assess their physical and acoustic properties, especially in terms of k2 and thermal stability, for further optimization enabling their exploitation in the self-cleaning system that is being developed.

Reduction mechanism of loss tangent of scandium-doped aluminum nitride thin film by post-deposition annealing

Scandium-doped aluminum nitride thin films are key materials for MEMS applications including bulk acoustic wave devices for communication. Although one drawback is the increase in the loss tangent with increasing Sc concentration, the loss tangent is reported to decrease after post-deposition annealing. However, the underlying mechanisms remain unclear. In this study, we propose the hypothesis that a low-resistivity thin layer near the surface of a substrate is one of the main reasons for the high loss tangent, and that annealing enhances the resistivity, eventually decreasing the loss tangent. The reasonability of the hypothesis was successfully confirmed by analyzing the frequency response of the loss tangent using an equivalent circuit with current–voltage characteristics, cathodoluminescence, etc. This achievement represents a significant step toward advanced methods for reducing the loss tangent and its application to other thin-film materials.

Enhancement in performance of SAW resonator on LN/SiC substrate by take slowness asymmetry into account

Abstract Layered structures comprising high-coupling lithium niobate (LiNbO3, LN) piezoelectric thin plates bonded to high-velocity SiC substrates have attracted much attention of high-performance surface acoustic wave (SAW) devices. However, such these layered structures exhibit severe Rayleigh mode spurious responses that degrade the performances of SAW devices. This paper explores the generation mechanism of spurious modes on LN/SiC layered structure, and proposes an optimized layered structure with suppressed Rayleigh spurious modes. The investigation involves deriving the Euler angle range of LN by analysing the slowness surface of both LN and SiC. In addition, it is worth noting that slowness surface overlaps at some Euler angle ranges, which will cause coupling between different modes, thus generating spurious mode. Simulation result shows the frequency characteristics of SAW resonator at resonant and anti-resonant frequencies of 4.3 GHz and 4.88 GHz of SH mode, achieving a K 2 of up to 26.5% and a quality factor Q of 828. It is proved that the optimization structure offering larger K 2, higher velocity and improved Q values and Rayleigh spurious mode suppression, which is favourable for wideband and high frequency SAW devices applications.

Effect of corrugation and rotation on SH wave propagation in an initially stressed functionally graded piezo-electric substrate

A rotating system that includes an initially stressed piezo-electric substrate was the subject of an analytical study of the SH waves. The substrate and vacuum bonding are in good contact with the corrugation, and the top border is treated as stress-free corrugation. About the upper barrier that is both electrically open as well as electrically short scenarios are taken into consideration. Dispersion equations for circumstances with a corrugated interface that are both electrically short as well as electrically open have been found. The SH wave characteristics through the framework suggested and circumstances dependent on different geometrical and physical factors have been investigated based on the numerical findings. The study looks at the simultaneous simulated outcomes of a number of physical factors that were produced in Mathematica 7 and include rotation, inhomogeneity, phase velocity, initial stress, and corrugated interface of SH wave distribution in a structure under discussion. The model under examination has potential applications in the creation of surface acoustic wave devices.

Coupled topological edge and corner states in two-dimensional phononic heterostructures with nonsymmorphic symmetries

The exciting discovery of topological phononic states has aroused great interest in the field of acoustic wave control. However, conventional topological edge states and corner states localized at the interface and corner of the two-phase domain wall structures are limited by single channel transmission characteristics, which decreases the flexibility of designing multi-channel acoustic wave devices. Here, we propose a two-dimensional (2D) topological phononic heterostructure with nonsymmorphic symmetries to realize the multiple interface topological multimode interference effect based on the coupling of topological edge and corner states. Topological phase transitions are achieved by altering the rotation angle of the split-ring scatterers in a square lattice. The coupled edge states are generated by the coupling between the edge states of ordinary-topological-ordinary (OTO) interfaces. Moreover, the higher-order topology of the square phononic crystals (PCs) is characterized by nontrivial bulk polarization, the topological and coupled corner states splitting into two pairs appear in the square OTO bend structure owing to the nonsymmorphic PC lack of mirror symmetries. Finally, the topological robustness of the multimode interference effect of coupled edge and corner states against defects is demonstrated. Our results pave the way for guiding and trapping acoustic waves in topological nonsymmorphic heterostructures, whose multi-channel transmission capability can be employed for designing topological phononic filters, couplers and multiplexers.

Phase velocity shifts of shear surface waves in flexoelectric wave-guide clamped on piezomagnetic base

Surface acoustic wave devices featuring periodic layers of piezomagnetic and piezoelectric-flexoelectric layers are subject to intense investigation. In miniaturized devices, large strain gradients are possible that produce significant flexoelectric fields in piezoelectric components. In the present theoretical research, surface acoustic wave transference has been manifested in a flexoelectric waveguide clamped over a piezomagnetic base. This endeavor involves the formulation and solution of coupled magneto-electro-elastic field equations governing the structure’s behavior. Coupled magneto-electro-elastic field equations for the structure have been derived and solved utilizing analytical techniques. By accounting for pertinent boundary conditions, the dispersion relations characterizing the velocity of surface waves, both in scenarios with and without electrodes have been obtained. Based on proper numerical examples, the frequency and phase velocity spectrum have been plotted offering insights into key parameters i.e. modal frequency, phase velocity, and wave attenuation. The outcomes of the theoretical study may be helpful in providing insights into mechanical wave propagation in coupled piezoelectric/piezomagnetic structures.

Acoustofluidic Diversity Achieved by Multiple Modes of Acoustic Waves Generated on Piezoelectric-Film-Coated Aluminum Sheets.

Excitation of multiple acoustic wave modes on a single chip is beneficial to implement diversified acoustofluidic functions. Conventional acoustic wave devices made of bulk LiNbO3 substrates generally generate few acoustic wave modes once the crystal-cut and electrode pattern are defined, limiting the realization of acoustofluidic diversity. In this paper, we demonstrated diversity of acoustofluidic behaviors using multiple modes of acoustic waves generated on piezoelectric-thin-film-coated aluminum sheets. Multiple acoustic wave modes were excited by varying the ratios between IDT pitch/wavelength and substrate thickness. Through systematic investigation of fluidic actuation behaviors and performances using these acoustic wave modes, we demonstrated fluidic actuation diversities using various acoustic wave modes and showed that the Rayleigh mode, pseudo-Rayleigh mode, and A0 mode of Lamb wave generally have better fluidic actuation performance than those of Sezawa mode and higher-order modes of Lamb wave, providing guidance for high-performance acoustofluidic actuation platform design. Additionally, we demonstrated diversified particle patterning functions, either on two sides of acoustic wave device or on a glass sheet by coupling acoustic waves into the glass using the gel. The pattern formation mechanisms were investigated through finite element simulations of acoustic pressure fields under different experimental configurations.

Portable surface acoustic wave device platform coupled with a paper-based capillary fluidics for real-time biosensing applications

Surface acoustic wave (SAW) sensors have emerged as prominent real-time, label-free biosensors with diverse applications in immunoassays and nucleic acid detection. However, widespread adoption in diagnostics has been impeded by challenges such as miniaturization of instrumentation, microfluidics fabrication and high attenuation in liquid environments. In this study we address these limitations by presenting a portable platform capable of real-time monitoring of a SAW microarray chip comprising up to four sensing channels, combined with a novel paper-based capillary flow channel. For the fabrication of a portable, automated and versatile sensor platform, we integrated a microcontroller, RF components, and a micropump for flow control. Calibration procedures ensured accurate measurements for both amplitude and phase, with a low drift rate (0.72 mdB/h and 1.00 mdeg./h, respectively) and high resolution (2.10 mdB and 6.10 mdeg.), indicating stable operation with minimal interface electronics. The capillary flow channel, implemented by confining the fluid on the sensing surface using a nitrocellulose strip, facilitated laminar and continuous sample flow with minimum damping of the acoustic signal. The sensor system was evaluated with two SAW devices at 100 and 200 MHz using glycerol dilutions within the range of 1 % and 70 %, demonstrating real-time monitoring capabilities and linear correlations between amplitude and phase changes. To prove the biosensing and clinical validity of the SAW newly developed system, DNA adsorption on a poly(L-lysine)-graft-poly(ethylene glycol) (PLL-g-PEG) functionalized SAW-surface was demonstrated with a detection limit of 0.001 μg/mL. Our study demonstrates the feasibility of a portable SAW sensor system coupled with a low-cost and replaceable capillary flow channel for real-time monitoring and biomolecular detection.