Al-doped ZnO nanoparticles were synthesized by sonochemical method from zinc acetate dehydrate and aluminum acetate as starting precursors. The deionized (DI) water was selected as the solvent. Sonication of the precursor was performed by a Sonics Model VCX 750 for 30 minutes until precipitated product was finally obtained. The as-precipitated powders were calcined at different temperature range of 550-1100 °C for 2 hr. For all samples, their crystal structures were investigated by X-ray diffraction (XRD) and surface morphologies were observed by scanning electron microscope (SEM). The XRD results revealed that, the purity of as-synthesized powders increases when the calcination temperature increases. Moreover, it is noticed that the AlZnO partial peaks will appear when the as-synthesized powders were calcined at 800 – 1000 °C. In addition, SEM micrographs show the increase of agglomeration and the particles when the calcination temperature increases.
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