ArF laser pulse transmission through commercial high purity CaF2 is determined by measuring the energy of each pulse before and behind the sample up to an incident fluence H of 10 mJ/cm2. The steady state transmission of ArF laser pulses decreases with increasing fluence. The related absorption coefficients αst(H) are proportional to H and rationalized by effective 1- and 2-photon absorption coefficients 2.4×10−4 cm−1≤αeff≤16.8×10−4 cm−1 and 1.7×10−9 cm W−1≤βeff≤9.3×10−9 cm W−1, respectively. The αeff and βeff values increase with the Na content of the CaF2 samples as identified by the fluorescence of Na-related MNa centers at 740 nm. This relation is simulated by a rate equation model describing the ArF laser induced MNa generation in the dark periods between the laser pulses and their annealing during laser irradiation. MNa generation starts with intrinsic 2-photon absorption in CaF2, yielding self-trapped excitons (STE). These pairs of F and H centers move upon thermal activation and the F centers combine with FNa to form MNa centers. MNa annealing occurs by its photo dissociation into a pair of F and FNa centers.
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