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Influence of the Deposition Method on the Hardness and Elastic Modulus of Biocompatible Thin Layers Deposited on Metallic Substrates

AbstractThe quality evaluation of the micro and nanostructured thin layers for biomedical applications, deposited on metallic substrates, by physical methods was the main objective of the research presented in this article. For this reason, micro and nanostructured TiN, TiO2 and CrN thin layers were deposited on CoCr and M30NW steel substrates by the Direct Current (DC) sputtering, High Power Impulse Magnetron Sputtering (HiPIMS) and cathodic arc methods. Nano-indentation tests were performed in order to establish the hardness and the elastic modulus of the TiN, TiO2 and CrN thin layers. It was observed that the highest values of the hardness and elastic modulus of TiO2 and CrN layers are obtained when the DC sputtering method is used for deposition. Cathodic arc method is the one that helps to obtain TiN layers with superior properties on both types of substrates and HiP sputtering can be used to obtain TiO2 and CrN layers with superior elastic modulus. Thus, the main conclusion of this study was that DC sputtering is the best method for deposition of biocompatible thin layers on metallic substrates. In the future, this method can be used for improving the quality and increasing the use period of biomedical components by thin layers deposition.KeywordsThin layersHardnessElastic modulus

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