Abstract

A transport equation was formulated for the elastically scattered secondary electrons with a simple insertion for elastic scattering in metals. Inelastic scattering acts as absorption and was considered. An inhomogeneous Milne equation was obtained and it was solved by the Wiener-Hopf method with consideration for various boundary conditions. The ratio of the free path length for elastic and inelastic scattering is a parameter and should be determined by corresponding experiments. (tr-auth)

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