Abstract
We associate tape casting and magnetron sputtering techniques to engineer flexible nanostructures using ZrO2 green tape as substrate. We systematically investigate the structural, magnetic and electrical properties of NiFe/Cr/NiFe trilayer nanostructures, with variable thickness values of the NiFe and Cr layers, grown onto rigid glass and flexible ZrO2 tape substrates. We verify the mirroring of these properties in the trilayer nanostructures, irrespective on the kind of employed substrate. The fact that the trilayer nanostructures can be reproduced in distinct substrates corresponds to an important advance for their applicability. The results place the ZnO2 green tape as an attractive candidate for application flexible substrate in the development of electrical and magnetic sensor elements with high sensitivity to mechanical stress.
Highlights
Low-cost thin ceramic membranes present interesting properties and find a wide range of applications in the fields of electronics and chemical processing technology
We consider a set of Ni81Fe19=Cr=Ni81Fe19 trilayer nanostructures, with variable thickness values of the NiFe and Cr layers, grown onto rigid glass and flexible ZrO2 tape substrates
It is expected that suspensions for tape casting exhibit pseudoplastic behavior, enabling the production of homogeneous tapes with smooth surface, which contributes to the quality of the final product [29]
Summary
Low-cost thin ceramic membranes present interesting properties and find a wide range of applications in the fields of electronics and chemical processing technology. Tape casting is a widespread colloidal processing that has as advantage the production of homogeneous green structures. This process consists basically in forming slurry and in casting it through a doctor-blade on a generally moving surface [8,9]. The use of additives in the slurries affects directly its behavior as well as the properties of the tape cast substrates. The composition and the rheological behavior of the aqueous slurries must be characterized and optimized in order to obtain green tapes, cracks and defects free with high and homogeneous green structure
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