Abstract
N-type semi-conducting oxides such as <TEX>$SnO_{2}$</TEX>, ZnO, and <TEX>$ZrO_{2}$</TEX> have been known for the detecting materials of inflammable or toxic gases. Of those materials, <TEX>$SnO_{2}$</TEX>-based sensors are well known as high sensitive materials to detect toxic gases. And the sensitivity is improved if catalysts are added. Detecting toxic gases, especially DMMP (di-methyl-methyl-phosphonate) and DPGME (Dipropylene glycol methyl ether), was performed by a mixture of Tin oxide (<TEX>$SnO_{2}$</TEX>) and Zirconia (<TEX>$ZrO_{2}$</TEX>). The films consist of each three different mass% of Zr (from 1 mass% to 5 mass%), and they were tested by XRD, SEM, TEM, BET. Nano-structure, pore and particle size was controlled to verify the sensor's sensing mechanism. The sensors was evaluated at five different degrees (from <TEX>$200^{\circ}C$</TEX> to <TEX>$400^{\circ}C$</TEX>) and three different concentrations (from 500 ppb to 1500 ppb). The sensors had good sensitivity of both simulants, and high selectivity of DMMP.
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