Abstract
Zero-rate output (ZRO) drift induces deteriorated micro-electromechanical system (MEMS) gyroscope performances, severely limiting its practical applications. Hence, it is vital to explore an effective method toward ZRO drift reduction. In this work, we conduct an elaborate investigation on the impacts of the internal and packaging stresses on the ZRO drift at the thermal start-up stage and propose a temperature-induced stress release method to reduce the duration and magnitude of ZRO drift. Self-developed high-Q dual-mass tuning fork gyroscopes (TFGs) are adopted to study the correlations between temperature, frequency, and ZRO drift. Furthermore, a rigorous finite element simulation model is built based on the actual device and packaging structure, revealing the temperature and stresses distribution inside TFGs. Meanwhile, the relationship between temperature and stresses are deeply explored. Moreover, we introduce a temperature-induced stress release process to generate thermal stresses and reduce the temperature-related device sensitivity. By this way, the ZRO drift duration is drastically reduced from ~2000 s to ~890 s, and the drift magnitude decreases from ~0.4 °/s to ~0.23 °/s. The optimized device achieves a small bias instability (BI) of 7.903 °/h and a low angle random walk (ARW) of 0.792 °/√ h, and its long-term bias performance is significantly improved.
Highlights
Micro-electromechanical system (MEMS) gyroscopes, a kind of Coriolis effect-based inertial sensors, are widely employed in the fields of aerospace, positioning, navigation, and consumer electronics [1,2]
To investigate the impacts of internal and packaging stresses on the zero-rate output (ZRO) drift of MEMS gyroscope, we modeled the packaged tuning fork gyroscopes (TFGs) with COMSOL Multiphysics software based on our practical devices
As to therelieve high- and low-temperature can bestresses applied to the need systemto reduc efficient the internal and shocks packaging isrelieve in great stress, we conduct a temperature-induced stress release experiment by fleetly switching the impacts of Joule heat generated by TFGs on the ZRO drift, enabling gyroscopes bette performances
Summary
Micro-electromechanical system (MEMS) gyroscopes, a kind of Coriolis effect-based inertial sensors, are widely employed in the fields of aerospace, positioning, navigation, and consumer electronics [1,2]. A one-time phase self-compensation method was reported to eliminate the circuit phase delay, and the temperature sensitivity of ZRO drift was greatly reduced [14]. We, for the first time, detailly investigate the impacts of the internal and packaging stresses on gyroscopes’ ZRO drift and demonstrate a temperature-induced stress release method to reduce the duration and magnitude of ZRO drift. With the assistance of generated thermal stresses, the temperature sensitivity of internal and packaging stresses is significantly reduced, effectively reducing the impacts of temperature variation on the ZRO drift during TFGs’ thermal start-up processes. We conducted an in-depth study about the effects of the internal and packaging stresses on the ZRO drift and reported a genuine improvement toward the duration and magnitude of ZRO drift, providing a new promise for improving the long-term bias performances of MEMS gyroscopes.
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