Abstract
The radiofrequency (rf) glow discharge plasma of styrene was investigated by direct sampling mass spectroscopy. Measurements were taken in three regions of the discharge : the plasma column and two dark zones before the electrodes. The plasma-polymerized styrene (PPS) thin films were analyzed by infrared spectroscopy (IR). The effects of monomer pressure and rf power on the ratios of mass peak heights C 4 H 2 + /C 4 H 3 + , C 6 H 6 + /C 6 H 5 CH=CH 2 + in the three discharge regions, the polymer deposition rate, and the polymeric structure of the PPS films were studied. It was found that in the different discharge regions and under various discharge conditions, a variety of reactive species were formed by electron impact on monomer molecules. The polymer deposition rate was mainly dependent on the total number of the reactive species produced in the discharge. The concentration of phenyl groups in PPS films was proportional to the relative concentration of phenyl ring-containing reactive species in the gas phase plasma.
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