Abstract
ZnO nanowire arrays with controlled diameter,density and orientation were prepared on the ZnO film coated substrates via hydrothermal method.The ZnO film were fabricated by atomic layer deposition(ALD) method and annealed at different temperatures.The annealing temperature has strong influences on the grain size,crystalline structure and defect property of the ZnO film.The diameter,density and orientation of ZnO nanowires depended on the features of the ZnO film.Field-emission scanning electron microscopy(SEM),X-ray diffraction(XRD) and photoluminescence(PL) were applied to analyze the ZnO film and ZnO nanowire arrays.The as-prepared vertical aligned ZnO nanowires are highly suitable for use in nanodevices,such as light-emitting diodes and solar cells.
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