Abstract
The surface acoustic wave (SAW) filter properties of ZnO/diamond/Si structure are calculated including velocity dispersion. It is well known that the pole width of a SAW filter response and the number of electrodes have a reciprocal relation for bulk piezoelectric materials. However, the pole width of layered structures tends to be narrower than that of expected bulk SAW devices and the reason is due to the velocity dispersion of layered structures. The pole width of layered structures was calculated by the delta function model including the velocity dispersion and was compared with the experimental results. The dispersion effect is also calculated by using the Smith's equivalent circuit model. The results of this analysis are presented and agree well with the experimental results.
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