Abstract
Zinc oxide (ZnO)-based film bulk acoustic resonator consisting of a piezoelectric element (Au∕ZnO∕Pt) and a Bragg reflector (ZnO∕Pt multilayer structure) has been fabricated by magnetron sputtering. The transmission electron microscopy and x-ray diffraction measurements revealed that all thin film layers in the device were well crystallized and highly textured. By electrical measurements, it was found that the device had a high resonant frequency (3.94GHz) and mass sensitivity (8970Hzcm2∕ng). The use of the device as a biosensor was demonstrated by comparing the resonant properties of the device with/without coatings of biospecies.
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