Abstract
ZnO:Mn thin films were prepared on glass substrates using RF magnetron sputtering method.Raman spectroscopy,X-ray diffraction spectra and SEM were used to analyze the structural characteristics of ZnO:Mn films with the different working pressure.The results show that ZnO:Mn thin films have the significant wurtzite structure with the different working pressure.The leftshifts of the Raman peaks corresponding to E2(High) mode and related to Mn doping are explained by the appearance of much more lattice defects and disorder in ZnO:Mn films with decreasing working pressure,which are also evidenced by XRD and SEM results.
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