Abstract
Surface acoustic wave (SAW) gas sensors are of continuous development interest to researchers due to their sensitivity, short detection time, and reliability. Among the most used materials to achieve the sensitive film of SAW sensors are metal oxide semiconductors, which are highlighted by thermal and chemical stability, by the presence on their surface of free electrons and also by the possibility of being used in different morphologies. For different types of gases, certain metal oxide semiconductors are used, and ZnO is an important representative for this category of materials in the field of sensors. Having a great potential for the development of SAW sensors, the discussion related to the development of the sensitivity of metal oxide semiconductors, especially ZnO, by the synthesis method or by obtaining new materials, is suitable and necessary to have an overview of the latest results in this domain.
Highlights
The increased level of pollution, the development of military resources, and the detection of certain diseases are just some of the areas in which sensors with remarkable sensitivities are being developed
Depending on the measurement data, gas sensors are classified into resistive sensors [6,7], surface acoustic wave (SAW) sensors [8,9], chemiresistive sensors [10,11], electrochemical sensors [12,13], calorimetric sensors [14,15], thermal conductivity sensors [16,17], optical sensors [8,18], etc
We focused on the study of SAW sensors for gas detection
Summary
The increased level of pollution, the development of military resources, and the detection of certain diseases are just some of the areas in which sensors with remarkable sensitivities are being developed. The response mechanism of SAW sensors results from the disturbance of the propagation characteristics of the acoustic waves, of wave velocity and attenuation, which result from the interactions at the level of the sensitive film [30,50,51]. The effects resulting from the interaction between the electrical field associated with the SAW and the analyte present at the level of the sensitive film, are defined as acoustoelectric effects [30] Considering these properties and principles that lead to a correct, high-performance operation of SAW sensors, the development of the sensitive layer from a compositional and morphological point of view will lead to the improvement of the sensitivity and selectivity for different types of gases
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