ZnO-MEMS sensor-cell prepared by inkjet printing for low concentration acetone detection

Abstract

In this study, inkjet printing tactics is employed to deposit sensitive materials, which is a nest-like array vertically assembled by petal-shaped structure composed of nanoparticles. It overcomes the disadvantages of cumbersome and unstable operation of traditional deposition technology for gas sensor sensitive materials based on MEMS. The mesoporous ZnO-sensor shows high gas-sensing response to low concentration acetone. The excellent performance of mesoporous ZnO-sensors lies in the uniform small nanoparticles, their multi-dimensional assembly structures and rich oxygen vacancy defects.