Abstract

ZnO thin films were fabricated on p-GaN substrate with zinc acetate as precursors by one-step aqueousmethod in this paper. The morphological and structural properties of ZnO/GaN heterostructure were studied. Meanwhile, the ultraviolet photodetector (UV) device based on ZnO/GaN heterostructure was fabricated and showed excellent UV response. The results demonstrate that the fabrication of large-scale ZnO/GaN heterostructure was greatly facilitated with relatively low cost by one-step growth method.

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