Abstract
We reported an easy fabrication method to realize ZnO-based microcavities with various cavity shapes by focused ion beam (FIB) milling. The optical characteristics of different shaped microcavities have been systematically carried out and analyzed. Through comprehensive studies of cathodoluminescence and photoluminescence spectra, the whispering gallery mode (WGM) was observed in different shaped microcavities. Up further increasing excitation, the lasing action was dominated by these WGMs and matched very well to the simulated results. Our experiment shows that ZnO microcavities with different shapes can be made with high quality by FIB milling for specific applications of microlight sources and optical devices.
Highlights
Micro/nanoscience made a great progress and attracted extensive research efforts because they have potential applications in optoelectronic devices, such as microlight sources, photo-switches, and optical integrated circuits [1–4]
The BX energy is lower than FX, which can be classified into donor bound exciton (DX) and acceptor bound exciton (AX)
The different shapes of single crystalline ZnO MCs were realized with circle, square, pentagon, hexagon, octagon, and even hexagram shapes
Summary
Micro/nanoscience made a great progress and attracted extensive research efforts because they have potential applications in optoelectronic devices, such as microlight sources, photo-switches, and optical integrated circuits [1–4]. The specific crystal facets of single crystalline wurtzite ZnO bulk parallel to the c-plane have a naturally hexagonal cross section, which would be able to readily serve as a high-quality whispering-gallery mode (WGM) resonator owing to its relatively high reflective index (~2.4) in comparison to the surrounding air. The high-quality factor (Q) of WGM microcavity (MC) could be achieved by the total internal reflection (TIR) that could facilitate to further reduce the lasing threshold. The ZnO-based WGM optical resonator was first reported by Nobis et al [6] and the corresponding WGM lasing action was observed in a ZnO nanonail [7].
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