Abstract

We report on the fabrication of 2-V-operating ZnO-based inverter with two n-channel thin-film transistors (TFTs) on 22-nm-thin organic/inorganic nanohybrid dielectric, which contains AlOx/TiOx/AlOx in triple-layer structure. The inverter shows a high voltage gain of ~20 under the supply voltage (VDD) of 2 V but with a marginal transition voltage of 0.1 V (operation range of 0-2 V). To control the transition voltage to a more adequate value, an 8-V gate pulse was applied on driving ZnO-TFT so that some of the channel electrons would be tunneled through the AlOx-based barrier and trapped in the TiOx-based layer. Our inverter then displayed an optimum transition voltage of 0.75 V.

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