Abstract

This chapter highlights some of the key research in MOCVD (MOVPE) of ZnO and related II-VI materials, mainly focusing on the crystal growth experimental work for obtaining layers and nanostructures of this family of materials. In order to promote successful use of the MOCVD technique, the availability of pure, volatile, and thermally stable precursors is fundamental. The chapter deals with some of the metalorganic and oxygen precursors that have been proposed for the growth of ZnO and its related materials. It also discusses some of the most-used substrates for the MOCVD growth of the ZnO family, emphasizing their interest and properties, as well as some cleaning, thermal, and preparation procedure. The chapter further discusses some techniques for the MOCVD growth of ZnO and related materials, and analyzes the growth of ZnO layers and nanostructures, focusing on the effects of different pre-, during, and postgrowth actions and conditions.

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