Abstract
Laser ablation, by Kr–F and Nd–YAG lasers, of solid targets of ZrO 2 has been studied in vacuum and in oxygen atmosphere. The plume expansion and composition have been characterized by mass spectrometric and optical techniques. Cluster ions Zr x O y and neutral species, formed in the plasma, have been identified by mass spectrometry. Plume velocity has been measured by a ICCD camera. Buffer gas effects and geometrical parameters have been optimized to improve the quality of the deposited thin films.
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