Abstract
Low energy ion scattering (LEIS) is an extremely surface sensitive technique that can quantitatively analyze the outermost atomic layer of a material. In LEIS and high sensitivity-low energy ion scattering (HS-LEIS), straightforward quantitation is available using reference and/or standard materials. Here, we present the HS-LEIS spectra of zinc obtained with 3 keV 4He+ and 4 keV 20Ne+ projectile ions. Zinc is an important material with a wide range of applications. Thus, these spectra should be useful standards/references for future applications. A high purity zinc foil was used for these measurements after the removal of the oxide layer. As a reference for the instrumental sensitivity, the spectra for Cu from a high purity foil are also included with this submission. Atomic sensitivity and relative sensitivity factors for Zn and Cu are reported.
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