Abstract

Metal organic framework (MOF) has recently attracted much attention due to its uniform pores consiting of metal ions and organic ligands. MOF was conventionally produced by a liquid phase method such as a hydrothermal way, but gas-solid phase reaction to form MOF on a substrate using ligand gas was recently reported by Ivo et al. However, orientation controlled MOF film is not yet obtained by gas-solid reaction. In this study, we investigated oriented MOF growth with highly oriented Al:ZnO (AZO) sputtered on single crytalline Al 2 O 3 (0001) substrates through solid, liquid, and gas-solid phase reaction. The crystallographic structure by XRD exhibited ZIF-8 film was polycrystalline.

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