Abstract
To obtain thick metal oxide films with low energy consumption at a low cost, metal ethylenediaminetetraacetic (EDTA) complexes were applied to the flame spray method as raw materials. This new method actualized the synthesis of yttria using a conventional flame spray machine with C2H2 and O2. A micrometer-thick yttria film was deposited from a Y-EDTA complex powder within 1min on a stainless steel plate. The organic components in the EDTA raw material were completely decomposed by the addition of oxygen into the flame, and the deposited films contained crystalline phases of Y2O3. We demonstrated that the reactive flame spray process using metal-EDTA complexes is convenient for obtaining metal oxide films at a low cost.
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