Young's Modulus of Nano Polycrystalline Silicon Film

Abstract

To apply the nano polycrystalline silicon film (NPSF) to MEMS piezoresistive device effectively, the Young's modulus of the NPSF were tested by in-situ nano mechanical test system, the results show that the Young's modulus of the NPSF is about between 155GPa and 158GPa. According to the specialties of growing and structure of the nano polycrystalline film materials, a theoretical model was presented which is suitable for NPSF. The Young's modulus of the NPSF was calculated by the model, the theoretical result agrees with the experimental result. The theory model is valid and can be applied to analyses of the Young's modulus of other nano polycrystalline film materials.