Abstract
Keyword : thin films, Young modulus, nanostructures Abstract. We have uniformly coated cantilever of an Atomic Force Microscope (AFM) with metallic thin films. These films are deposited with a system of Metal Plasma Immersion Ion Implantation and Deposition (MePIIID). The metals used for deposition were gold, platinum and palladium. These films are nanostructured with thickness going from 18 up to 111 nm. We have determined the Young modulus of the metallic thin films (E 2). The E 2 values for gold, platinum and palladium are: 69,1 ± 2.6 GPa, 139.7 ± 2.7 GPa and 115.1 ± 2.1 GPa, that are about 12%, 12% and 7 % lower than the respective bulk elastic modulus.
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