Abstract

Wide band gap crystals doped with trivalent rare earth ions can be used as optical filters and refractive elements for 157-nm photolithography. Applications are depending on the structure of the levels of the 4fn−15d electronic configuration. The 4fn→4fn−15d dipole allowed transitions of Nd3+, Pr3+ and Gd3+ ions in YF3 crystal hosts, in the vacuum ultraviolet region of the spectrum were studied by applying laser-induced fluorescence using the molecular fluorine laser at 157 nm, and absorption spectroscopy.

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