Yet one more dwell time algorithm

Abstract

The current demand of even more powerful and efficient microprocessors, for e.g. deep learning, has led to an ongoing trend of reducing the feature size of the integrated circuits. These processors are patterned with EUV-lithography which enables 7 nm chips [1]. To produce mirrors which satisfy the needed requirements is a challenging task. Not only increasing requirements on the imaging properties, but also new lens shapes, such as aspheres or lenses with free-form surfaces, require innovative production processes. However, these lenses need new deterministic sub-aperture polishing methods that have been established in the past few years. These polishing methods are characterized, by an empirically determined TIF and local stock removal. Such a deterministic polishing method is ion-beam-figuring (IBF). The beam profile of an ion beam is adjusted to a nearly ideal Gaussian shape by various parameters. With the known removal function, a dwell time profile can be generated for each measured error profile. Such a profile is always generated pixel-accurately to the predetermined error profile, with the aim always of minimizing the existing surface structures up to the cut-off frequency of the tool used [2]. The processing success of a correction-polishing run depends decisively on the accuracy of the previously computed dwell-time profile. So the used algorithm to calculate the dwell time has to accurately reflect the reality. But furthermore the machine operator should have no influence on the dwell-time calculation. Conclusively there mustn’t be any parameters which have an influence on the calculation result. And lastly it should take a minimum of machining time to get a minimum of remaining error structures. Unfortunately current dwell time algorithm calculations are divergent, user-dependent, tending to create high processing times and need several parameters to bet set. This paper describes an, realistic, convergent and user independent dwell time algorithm. The typical processing times are reduced to about 80 % up to 50 % compared to conventional algorithms (Lucy-Richardson, Van-Cittert …) as used in established machines. To verify its effectiveness a plane surface was machined on an IBF.