Abstract
DC and RF magnetron sputtering techniques were used for growing nano-films (t<100 nm) of high temperature superconducting (HTS) YBa2Cu3O7 (YBCO) and ferromagnetic (FM) manganite La0.7Sr0.3Mn03 (LSMO) materials on LaAlO3 (LAO) and Al2O3 (ALO) substrates as well as for preparing of single-, double- and three-layer structures in different areas of the same substrates. The procedure allowed growing of structures on LAO substrates where the critical temperature of YBCO thin film components was more than 84 K. The LSMO films grown ALO substrates were ferromagnetic while the YBCO films grown on LSMO/ALO did not demonstrate superconductivity.
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