Abstract
YBaCuO Josephson generators fabricated by preliminary topology masks
Highlights
It is well known that the properties of thin YBCO films are very sensitive to the processes of formation of planar structures
New technology of preliminary mask (PM) with CeO2 buffer layer, which determines the necessary topology of the structure directly during the growth of the YBCO film has been developed [24]
The exclusion of the etching operation of the YBCO film from the technological process is important for structures with weak links, where the film is most sensitive to possible destructive factors
Summary
It is well known that the properties of thin YBCO films are very sensitive to the processes of formation of planar structures. New technology of preliminary mask (PM) with CeO2 buffer layer, which determines the necessary topology of the structure directly during the growth of the YBCO film has been developed [24]. The exclusion of the etching operation of the YBCO film from the technological process is important for structures with weak links, where the film is most sensitive to possible destructive factors.
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