Abstract
The evaporation process of β-diketonate precursors for the MOCVD deposition of YBa 2 Cu 3 O 7-x , superconducting films has been investigated by thermogravimetric analysis. Special attention has been paid to the Ba(thd) 2 precursor. A simple model of the reactions involved in this process has been described. YBa 2 Cu 3 O 7-x , superconducting layers were deposited on YSZ substrates by MOCVD in a horizontal hot-wall reactor. Films showed a mixture of c-axis and a-axis orientation, and have a T c (R=0)=88.2K and T c onset=91.6K
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