Abstract
High T c superconducting films of YBa 2Cu 3O 7−δ were deposited by a novel chemical vapor deposition procedure. 1-butanol solutions of the volatile yttrium, barium and copper derivatives of 2,2,6,6-tetramethyl-3,5-heptanedione were ultrasonically nebulized and pyrolyzed onto MgO substrates at 430 °C. The solutions were nebulized with “soft spray” ultrasonic nozzles operating at 60 and 120 kHz giving median droplet sizes of 19 and 10 μm respectively. Experimentally parameters affecting film composition are discussed. The as-deposited films were poorly crystalline. Annealing the films in flowing argon at 830 °C, was followed by a short anneal in O 2 at 880 °C and slow cooling in O 2. The films were metallic with T c values as high as 80–81 K ( R=0). Films were characterized by X-ray diffraction, optical and scanning electron microscopy, elastic backscattering and transport measurements.
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