Abstract
We report Josephson junctions in YBa 2Cu 3O 7− δ thin films, fabricated by oxygen irradiation at 200 keV through a 50 nm wide slit in an implantation mask. After annealing the irradiated microbridges at 500°C in an oxygen atmosphere, the implanted region has a reduced but finite transition temperature, allowing Josephson coupling in a temperature window of <15 K. Close to the coupling temperature the critical current shows a nearly complete modulation in an applied magnetic field. This indicates a homogeneous current distribution in the junction. Over the entire temperature range of Josephson coupling, the junctions exhibit resistively shunted junction like I– V characteristics with additional excess current. Furthermore, the exponential dependence of the critical current on temperature is in good agreement with conventional superconductor-normal-superconductor proximity effect theory.
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